SOURCES SOUGHT
66 -- UV Photostabilizer System
- Notice Date
- 2/14/2012
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-SS-202
- Archive Date
- 3/15/2012
- Point of Contact
- Lynda M Roark, Phone: 3019753725, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
Lynda.Roark@nist.gov, patrick.staines@nist.gov
(Lynda.Roark@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing a UV Photostabilizer System which is required for a photoresist stabilization step where patterned photoresist material is exposed to radiation having a wavelength that promotes cross-linking in the shallow surfaces of the patterned photoresist features. This process creates a robust surface polymer layer which is immune to photoresist developer, photoresist solvents, intense ion implantation and intense etchants and also enables for the resist not to deform when baked at a temperature above its glass transition temperature. The diversity of mask pattern and material systems encountered from the wide range of projects at NIST demands an advanced and flexible photostabilizer system to provide researchers more precise and consistent critical dimensions and pattern. The spectrum of light source in the UV Photostabilizer System is required to be within UV photoresist absorption range. The option for different or shorter wavelength in UV range needs to be available for future replacement. The system must be able to handle various sizes of samples as well as up to 200mm wafer for R&D purpose. Sample stage should serve as vacuum chuck hotplate up to 250 °C or higher to produce smooth photoresist profile. After results of this market research are obtained and analyzed and specifications are developed for the Photostabilizer System that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. NIST has a need for a UV Photostabilizer System that would meet the following preliminary requirements: UV Photostabilizer System: • UV beam spectrum ranges from 320nm to 450nm • Available lamp spectrum options for various and shorter wavelength. • Illumination intensity ≥ 8 mW/cm2 @ 365nm • Beam Uniformity over the curing area to +-5% • Curing area up to 200mm x 200mm • System can handle various size of samples up to 200mm wafer • Heated vacuum sample stage goes up to 250 °C or higher • Programmable control on exposure time, lamp intensity level and heating process. • UV light protection shield • Nitrogen environment control • System capable of multiple or adjustable wavelength system • Options: sample stage with lift-pins, UV shield with interlock NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice. Companies that manufacture Photostabilizer System are requested to email a detailed report describing their abilities to Lynda.Roark@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to Lynda.Roark@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-SS-202/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02675111-W 20120216/120214235837-9c2dab72f7bde3ac345d74c71e9977cd (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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