MODIFICATION
66 -- Dual Module Resistivity and Mobility Measurement System
- Notice Date
- 7/18/2011
- Notice Type
- Modification/Amendment
- NAICS
- 334513
— Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
- Contracting Office
- Department of the Air Force, Air Force Materiel Command, ASC/PKO, 1940 ALLBROOK DRIVE, WRIGHT-PATTERSON AFB, Ohio, 45433-5309, United States
- ZIP Code
- 45433-5309
- Solicitation Number
- FA8601-11-R-0114SS
- Archive Date
- 7/29/2011
- Point of Contact
- Michael J. Allen, Phone: 9375224586
- E-Mail Address
-
michael.allen2@wpafb.af.mil
(michael.allen2@wpafb.af.mil)
- Small Business Set-Aside
- N/A
- Description
- This is a sources sought announcement only, and is not an intent to procure. A solicitation is not available at this time, and any requests for a solicitation will not receive a response. ASC/PKOA Contracting at Wright Patterson AFB, OH, is conducting market research to determine the availability of firms to provide a Dual Module Contactless Resistivity and Mobility Measurement System to be used to non-destructively characterize electrical properties of wafers preparatory to device fabrication in a clean room lab. These measurements are critical to correlating material to devise performance. Desired system must have capability to evaluate electronic materials structures on full wafers ranging from 2" to 8" in diameter for research and development programs. Below are a summary of the major technical requirements necessary to meet our needs are: Resistivity Module: Equipment Configuration - Eddy current technique measurement unit with precision motorized wafer handler. - All computer/flat panel monitor/printer hardware is to be included. System to run MS Windows 7. - System software with the ability to map up to 300 points on 2" through 8" samples. - Power conditioning unit System Capabilities - High Resistance Range, which covers a span of 16 through 3,200 ohms/square (as verified by available NIST and/or VLSI certified wafer standards). - Ability to process two (2) through eight (8) inch nominal sized wafers. - Mylar "target" to be supplied for placement of smaller samples. - Throughput Capability: a 55 point mapping plan in 4 minutes per wafer. - Data display can be in sheet conductance and resistance OR bulk conductivity and resistivity. - Linearity: <±3% over 16 through 3,200 ohm/square range Standard Deviation: Sheet Resistance Standard Deviation Range 3200 ohm/sq 1.0% HI 600 ohm/sq.2% HI 16 ohm/sq.1% HI The Resistivity module must have a positional repeatability of ±1.5 mils* and a rotational repeatability of better than ±10. (* based on a 55 point mapping plan.) Sophisticated summary screens and graphical displays showing localized test data on wafer representation or columnar format for the data obtained during measurement. Mobility Module: The Government requires the mobility module to allow non-destructive, non-contact measurement and mapping of production wafers. Measurements must include carrier mobility, sheet carrier density, bulk carrier density (with epi layer thickness input) and sheet resistance on compound semiconductor processed layers. These measurements will be done at room temperature using moderate levels of magnetic field strength. Equipment Configuration: - Measurement unit with precision motorized wafer handler. - All computer/flat panel monitor/printer hardware is to be included. - System software with the ability to map up to 55 points (2" through 8" samples). System to be provided with Windows 7 Software. System Capabilities: - Measurement Ranges must cover a span of Mobility of 100 through 20,000 cm2/V-sec and Sheet Resistance of 100 - 3,000 ohms/sq - Ability to process two (2) through eight (8) inch nominal sized wafers. Special template is required for placement of smaller samples. - Module must have a positional repeatability of ±1.5 mils* and a rotational repeatability of better than ±1.50. (*based on an 18 point mapping plan.) - Sophisticated summary screens and graphical displays to show localized test data on wafer representation, and columnar format for the data obtained during measurement. Magnet Electromagnet-magnet to be included Magnet requirements: - Pole-face spacing: 2.7" - Pole orientation: Horizontal - Field strength: +/- 10. 0 K gauss (+/-1.0T) nominal - Reversible - Field uniformity: +/- 1% Each potential source shall give a brief description of their product and ability to satisfy the requirements identified above. All responses should include product model number, manufacturer, specifications, delivery timeline, and any applicable warranties. Each potential source, if not the manufacturer, must be an authorized supplier capable of providing and honoring the commercial manufacturer's warranties on the prospective items that meet these requirements. All responses to this sources sought are limited to seven pages and must include the following additional information: name and address of firm, commercial activity/government entity (CAGE) code, small or large business size status, point of contact name, title, phone, and email. Interested sources shall submit all replies by email to michael.allen2@wpafb.af.mil no later than 8:00 AM EST on Tuesday, 26 July 2011. Acknowledgement of receipt will not be made. THE GOVERNMENT DOES NOT INTEND TO AWARD A CONTRACT ON THE BASIS OF THIS SOURCES SOUGHT OR TO OTHERWISE PAY FOR THE INFORMATION SOLICITED. This request for information is for planning purposes only and shall not be considered as an Invitation for Bid (IFB), Request for Quotation (RFQ), or Request for Proposal (RFP), or as an obligation on the part of the Government to acquire any products or services. Your responses to this sources sought will be treated as information only. No entitlement to payment of direct or indirect costs or charges by the Government will arise as a result of contractor submission of responses to this sources sought or Government use of such information. The Government reserves the right to reject, in whole or part, any contractor input resulting from this sources sought. The information resulting from this sources sought may be included in one or more RFP's, which may be released via the FEDBIZOPPS.GOV portal.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/USAF/AFMC/88 CONS/FA8601-11-R-0114SS/listing.html)
- Place of Performance
- Address: Wright Patterson AFB, Ohio, 45433, United States
- Zip Code: 45433
- Zip Code: 45433
- Record
- SN02501849-W 20110720/110719000015-71673ec553a0f3a1f10c50453cd99ebd (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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