SOLICITATION NOTICE
66 -- Magnetically Levitated Turbo-Molecular Pump
- Notice Date
- 3/7/2011
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB687030-11-01778
- Archive Date
- 4/5/2011
- Point of Contact
- Jennifer L. Malcolm, Phone: 3034973764
- E-Mail Address
-
jennifer.malcolm@nist.gov
(jennifer.malcolm@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. ***This solicitation is being issued using Simplified Acquisition Procedures.*** ***This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-47.*** *** The associated North American Industrial Classification System (NAICS) code for this procurement is 333295 with a small business size standard of 500 employees.*** ***This requirement is a small-business set-aside, and only small businesses may submit a quotation.*** General Description: NIST requires an oil free magnetically levitated turbo-molecular pump (TMP) for use on sputtering deposition chamber. The TMP must be rated with a pumping speed of at least 2000 L/s with a molecular drag stage to accommodate high foreline pressures. Specifications/Requirements This description is for a magnetically levitated turbomolecular vacuum pump that will be used for a process/sputtering deposition vacuum chamber. 1. The TMP must have an ultimate pressure rating less than 10"-10 Torr. 2. Must be lubricant free (oil free) with completely magnetically levitated bearings. 3. Must have a self-contained protection mechanism that powers the magnetically levitated bearing and allows the TMP to spin down safely in the event the external power is cut-off to the controller/pump (e.g. during a power failure). Preference is given a systems that do not use or rely on battery backup. 4. Must have a pumping speed of at least 2000 L/s. 5. Must have a molecular drag stage to accommodate high foreline pressures (up to 1 Torr preferable). This translates to a compression ratio for nitrogen greater than 10"10 6. Must connect to a 12 inch UHV conflat (CF). 7. Must be able to operate and mount in any geometry/orientation (especially in both a horizontal and vertical position). 8. Must include the controller/power supply and all necessary cables/hardware needed to operate. the TMP. Cables must be a minimum of 15 ft. in length. 9. Must be water cooled versus fan cooled. Fan cooling is okay on the controller. 10. Must be new. Used or rebuilt systems will not be considered. 11. Must have at least a 1 year warranty. Technical Capability, and Past Performance, when combined, shall be approximately equally important as Price. Technical Capability: Evaluation of Technical Capability will be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. If an offeror does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not. Past Performance: The Government will evaluate the Offeror's past performance information and, if appropriate, its proposed subcontractors' past performance to determine its relevance to the current requirement and the extent to which it demonstrates that the offeror has successfully completed relevant contracts in the past five years. In assessing the offeror's past performance information, NIST will evaluate the quality, timeliness, and ability to control cost and schedule of the past work. Evaluation of this factor will be based on information contained in the technical portion of the quotation and information provided by references. The Government will evaluate past performance information by contacting appropriate references, including NIST references, if applicable. The Government may also consider other available information in evaluating the Offeror's past performance. The Government will assign a neutral rating if the offeror has no relevant past performance information. Price: Quoted price will be evaluated for reasonableness. *** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. *** *** The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. *** *** Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. ***The following clauses apply to this acquisition: 1. 52.212-4 Contract Terms and Conditions-Commercial Items; 2. 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: a. 52.219-6 Notice of Total Small Business Set-Aside b. 52.219-28 Post Award Small Business Program Rerepresentation c. 52.222-3 Convict Labor d. 52.222-19 Child Labor - Cooperation With Authorities And Remedies e. 52.222-21 Prohibition of Segregated Facilities f. 52.222-26 Equal Opportunity g. 52.222-35 Equal Opportunity for Special Disabled Veterans h. 52.222-36 Affirmative Action for Workers with Disabilities i. 52.222-37 Employment Reports on Special Disabled Veterans j. 52.225-3 Buy American Act - Free Trade Agreement - Israeli Trade Act Alternate I of 52.225-3 k. 52.225-13 Restriction on Certain Foreign Purchases, and l. 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Clauses: 1352.201-70 Contracting officer's authority (APR 2010) The Contracting Officer is the only person authorized to make or approve any changes in any of the requirements of this contract, and, notwithstanding any provisions contained elsewhere in this contract, the said authority remains solely in the Contracting Officer. In the event the contractor makes any changes at the direction of any person other than the Contracting Officer, the change will be considered to have been made without authority and no adjustment will be made in the contract terms and conditions, including price. (End of clause) 1352.215-72 Inquiries (APR 2010) Offerors must submit all questions concerning this solicitation in writing to Jennifer.malcolm@nist.gov. Questions should be received no later than 2:00 p.m. Mountain Standard Time, Wednesday, March 16, 2011. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract. (End of clause) ***Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** ***All offerors shall submit the following: 1) An original and one (1) copy of a quotation 2) An original and one (1) copy of the technical description and/or product literature (including Country of Origin information); 3) Description of commercial warranty; 4) list of three (3) references which includes the contact's name, phone number, and e-mail.*** ***All quotes shall be sent to the National Institute of Standards and Technology, Acquisition Management Division; Attn: Jennifer Malcolm; 325 Broadway, MC 194; Boulder, CO 80305 or emailed to Jennifer.malcolm@nist.gov.*** ***Complete submissions shall be received no later than 12:00 p.m. Mountain Standard Time on Monday, March 21, 2011. E-mail quotations shall not be deemed received until the quotation is entered in the e-mail inbox of Jennifer Malcolm.***
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB687030-11-01778/listing.html)
- Place of Performance
- Address: 325 Broadway, Boulder, Colorado, 80305, United States
- Zip Code: 80305
- Zip Code: 80305
- Record
- SN02394668-W 20110309/110307234224-08989b00e4218629f1aae5c9968687bc (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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