SOLICITATION NOTICE
66 -- To Provide a AccuThermo AW 610 system
- Notice Date
- 3/1/2011
- Notice Type
- Presolicitation
- NAICS
- 335999
— All Other Miscellaneous Electrical Equipment and Component Manufacturing
- Contracting Office
- Department of Energy, Brookhaven National Laboratory (DOE Contractor), Brookhaven, PO Box 5000, Bldg. No. 355, Upton, New York, 11973
- ZIP Code
- 11973
- Solicitation Number
- BG189014
- Archive Date
- 3/22/2011
- Point of Contact
- Beth Gilman, Phone: 6313444144
- E-Mail Address
-
gilman@bnl.gov
(gilman@bnl.gov)
- Small Business Set-Aside
- N/A
- Description
- AccuThermo AW 610 system Desired specification of rapid thermal processor (RTP) 1. Wafer size: Up to 6" 2. Quartz process chamber 3. No. of infrared lamps: >20 4. Ramp rate: >150ºC/sec, programmable both up and down 5. Steady temperature range: up to 1250ºC 6. Steady state process time: >10000 sec, programmable 7. Temperature accuracy: <±1ºC 8. Temperature uniformity: <±5ºC 9. Use of extended pyrometer 10. Standard No. of MFC: at least 1 11. Integrated PC, software, and monitor 12. Temperature calibration wafer 13. Temperature calibration meter 14. Height: <11" 15. Width: <27" 16. Depth: <18" 17. Weight: <60 kg
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/BHL/BNL/BG189014/listing.html)
- Place of Performance
- Address: Upton, New York, 11973, United States
- Zip Code: 11973
- Zip Code: 11973
- Record
- SN02390532-W 20110303/110301234918-9bb9fd71f615107fc150a6fa6ca6f1b7 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |