Loren Data's SAM Daily™

FBO DAILY ISSUE OF SEPTEMBER 26, 2010 FBO #3228
SOLICITATION NOTICE

A -- Tectra_Ion Etch Sputter Gun

Notice Date

9/24/2010
 

Notice Type

Presolicitation
 

NAICS

332999 — All Other Miscellaneous Fabricated Metal Product Manufacturing
 

Contracting Office

Department of Energy, SLAC National Accelerator Lab, SLAC National Accelerator Lab, 2575 Sand Hill Road, Menlo Park, California, 94303, United States
 

ZIP Code

94303
 

Solicitation Number

SLAC_RFQ-157757
 

Archive Date

10/12/2010
 

Point of Contact

Gloria J. Azevedo, Phone: 6509262699
 

E-Mail Address

glo@slac.stanford.edu
(glo@slac.stanford.edu)
 

Small Business Set-Aside

N/A
 

Description

Please provide me with a written quotation for the following item: IonEtch Sputter Gun Energy: 25eV - 5 keV Aperture: 1.5mm (standard) Current: max. 1mA at >2 keV with Ø1,5mm aperture and Ar, current density up to 30μA/cm² for higher ion currents/ion densities, see options Beam Divergence: energy dependant (typ. 15° half angle at 1keV) Working Distance: 10 cm (typ.) Gas Inlet: mini Conflat CF-16 (1.33"OD) Gas Flow Rate: 1 - 5 sccm (1.5 sccm typ. Gas dependant) Working Pressure: 10-6mbar - 10-3mbar (5x10-6mbar typical with 1.5mm aperture in chamber with 500l/s pump) Ionization eff.: 0.4% (Argon) Source: Microwave Plasma Discharge (No Filament) Mount: NW35CF (2.75"OD) Max. Bakeout: 200°C Source Diameter: 34 mm Leak Valve: required (not included) Integral Power Supply 14,540 Qty 1 each Quote brand name or equal, source selection will be based upon the low-priced technically acceptable method. Provide technical data sheets or documentation in support of your offer
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/SLAC/STAN/SLAC_RFQ-157757/listing.html)
 

Place of Performance

Address: 2575 Sand Hill Rd, Menlo Park, California, 94025, United States

Zip Code: 94025
 

Record

SN02295927-W 20100926/100924235022-9a2ac0f935a3824ed9ac2d91dbcc111b (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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