SOLICITATION NOTICE
66 -- Sputter Deposition Chamber System
- Notice Date
- 7/20/2010
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-10-RQ-0510
- Archive Date
- 8/18/2010
- Point of Contact
- Andrea A Parekh, Phone: (301)975-6984, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
andrea.parekh@nist.gov, todd.hill@nist.gov
(andrea.parekh@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-44. 1352.215-72 INQUIRIES (APR 2010) Offerors must submit all questions concerning this solicitation in writing to Andrea Parekh, Contract Specialist, with copy to Todd Hill, Contracting Officer. Questions should be received no later than 10 calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract. The associated North American Industrial Classification System (NAICS) code for this procurement is 333295 with a small business size standard of 500 employees. This requirement is a 100% SMALL BUSINESS SET-ASIDE. ***The National Institute of Standards and Technology is seeking to purchase a Sputter Deposition System. ****All interested Contractor's shall provide a quote for the following: Line Item 0001: Quantity One (1) Sputter Deposition Chamber System. The system must meet or exceed all of the minimum specifications identified herein. All equipment must be new. Used or remanufactured equipment will not be considered for award. The system must consist of all the following components: The main purpose of the sputter deposition chamber is for in-house fabrication of Li-ion battery test structures. Specifically, the sputter chamber will be used to deposit a variety of materials including, but not limited to, metals (Al, Cr, Ni, Pt, etc) as well as oxides (LiCoO2, LiFePO4, LiMn2O4, LiTiOx, etc) and oxy-nitrides (LiPON). The sputtering deposition system will be used to synthesize thin film hetero-structures consisting of complex oxides, nitrides, conventional semiconductors, and metals that will constitute electrochemical cells or their components capable of energy conversion and storage. The cell fabrication will be designed for the purposes of 1) fabricating electrochemical cells (batteries) of nanoscale dimensions, for example by means of the deposition of a thin film cell hetero-structure on top of silicon nanowires; 2) fabricating cells that can be subsequently converted with post-fabrication methods into nano-batteries, for example, creating a thin film battery, testing it, and then cutting it with Focused Ion Beam tool into a battery of nanoscale dimensions for subsequent characterization; 3) fabricating a component of an electrochemical cell for the characterization of its properties and performance at nanoscale level. The sputter chamber system should meet or exceed the following specifications: 1. A stainless-steel chamber with dimension 14" high x 10" OD or larger; 2. Vacuum pumping capable of reaching of the base chamber pressure = 1.e-7 Torr; 3. Two magnetron sputtering sources with the capability of extension to 3 sources; 4. One DC and one RF generator for the sputtering sources; 5. Vacuum gauges capable of pressure monitoring in the range of 0.5 - 5.e-9 Torr; 6. A substrate holder with motorized rotation for uniform deposition with the deposited film thickness variation within 3% over a 4" diameter wafer. The substrate must allow for adjusting the working distance between the substrate and a sputtering source within 40mm range; 7. The system must have at least two gas inlets equipped with mass flow controllers; 8. Must have a motorized main chamber valve for automated pressure control; 9. Must have pneumatic shutter controls allowing remotely-controlled opening and closing of the magnetron sputter sources; 10. Must have a substrate heater for the temperature control of the sample while deposition in the range from room temperature to 600 degrees Celsius; 11. Must have magnetic transfer arm or equivalent transfer mechanism and the system capability to move the sample from and into an attached glove box (purchased by NIST, separately) in controlled environment or vacuum without exposing the sample to the ambient atmosphere; 12. Must have RF biasing capability of the substrate while heating, or rotation, or deposition with up to 50W RF power. OPTION LINE ITEMS: The following line items are Option Line Items. The Contractor shall provide pricing for these items. The pricing shall be effective for one (1) year from the date of award. These Line Items will be evaluated in accordance with FAR 52.217-5 and may be exercised at award or during option period set forth under FAR 52.217-7: Option Line Item 0002: Automated pressure control; Option Line Item 0003: A thin film thickness monitoring option; Option Line Item 0004: Separately pumped sample load lock; Installation The system shall be installed by the Contractor and meet contract specifications no later than 45 days after components are in place in Building 216 Room D101 Installation, at a minimum, shall include uncrating/un-packaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD. Training The contractor shall conduct one (1) training session for up to five (5) users at NIST. This training is for operation of the glove box, not the third party pieces inside. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation/set-up and on-site measurements demonstrating that no damage or misalignment issues arose during transportation and installation, but shall be completed no later than 30 days after installation. Inspection and Final Acceptance Criteria In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor's expense. Performance Test Measure deposition rate and thickness uniformity of a metal oxide and metal film deposition will be tested after installation. Sputter targets will be ready for installation. ***The Contractor shall provide a minimum one (1) year warranty on all components including return to factory repair. The Contractor shall be responsible for the equipment during transit. All costs including parts, labor, travel, and other expenses necessary to repair any machine equipment will be borne solely by the contractor at no additional cost to the U.S. Government. A preference shall be given to the Offeror that provides on-site repair during the warranty period. **Delivery shall be provided not later than 16 weeks after receipt of an order. Delivery shall be FOB Destination. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640. *** Award shall be made to the Contractor whose quote offers the best value to the Government, price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement", 2) Past Performance, 3) Experience and 4) Price. Technical capability, past performance, and experience, when combined, shall be approximately equal to price. If Technical Capability, Past Performance, and Experience are equivalent, price shall be the determining factor. Technical Capability: Evaluation of Technical Capability shall be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. Quoters shall also include product literature which addresses all specifications & clearly documents that the product offered meets or exceeds the specifications identified herein. Note: If an offeror does not indicate whether its proposed equipment meets a certain technical requirement, NIST will determine that it does not. A preference shall be given to the Offeror that provides on-site repair during the warranty period. Past Performance Past Performance will be evaluated to determine the overall quality of the product & service provided and the Contractor's history of meeting delivery schedules for prior deliverables. Evaluation of Past Performance shall be based on the references provided and/or the quoters recent and relevant procurement history with NIST or its' affiliates. Offerors should provide a list of 3-5 references to whom the same or similar equipment has been provided. Experience The Offeror shall describe their experience performing similar work, explain how their experience is relevant to this project, demonstrate that they have successfully installed at least three (3) systems in the field and how their experience will ensure successful completion of the project. NIST will evaluate the extent of the offeror's experience providing similar equipment and will consider the relevance of the offeror's experience to the current requirement. Past Performance, Experience, and Price shall not be evaluated on quotes that are determined technically unacceptable in accordance with the Technical Capability Evaluation factor. *** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. *** *** The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. *** *** Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. ***The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: (16) 52.222-3, Convict Labor; (17) 52.222-19 Child Labor - Cooperation With Authorities And Remedies; (18) 52.222-21, Prohibition of Segregated Facilities; (19) 52-222-26, Equal Opportunity; (21) 52.222-36, Affirmative Action for Workers with Disabilities; (29) 52.225-3 Buy American Act - Free Trade Agreements - Israeli Trade Act; ALTERNATE II (31) 52.225-13 Restriction on Certain Foreign Purchases; (36) 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** 52.217-5, Evaluation of options 52.217-7, Option for increased quantity-separately priced line items This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) ***All quoters shall submit the following: 1) An original and one (1) copy of a quotation which addresses all of the above line items; 2) An original and one (1) copy of the technical description and/or product literature; 3) Description of commercial warranty; and 4) An original and one (1) copy of the most recent published price list(s), and 5) Past performance references which must include the company/organizations name, contact person, phone number, and e-mail address. ***All quotes shall be received not later than 3:00 PM local time, on August 03, 2010, at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B125, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Andrea Parekh. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Contract Specialist (Andrea G. Parekh) @ andrea.parekh@nist.gov. E-mailed quotes are acceptable. Faxed quotes will NOT be accepted. Offerors' quotations shall not be deemed received by the Government until the quotation is entered into the e-mail address inbox set forth above. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Andrea Parekh, Contract Specialist on 301-975-6984.
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