SOURCES SOUGHT
66 -- RECOVERY - DUAL CHAMBER MOLECULAR BEAM EPITAXY (MBE) MACHINE
- Notice Date
- 12/28/2009
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-10-SS27
- Archive Date
- 1/28/2010
- Point of Contact
- Eduardo F. Baca, Phone: 3019756388, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
eduardo.baca@nist.gov, patrick.staines@nist.gov
(eduardo.baca@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- RECOVERY - THIS IS NOT A REQUEST FOR QUOTATIONS; A FULLY DEVELOPED TECHNICAL AND PRICE QUOTATION IS NEITHER NECESSARY NOR DESIRED. INFORMATION RECEIVED WILL BE USED FOR MARKET RESEARCH PURPOSES ONLY. THIS CONTEMPLATED PROCUREMENT IS ANTICIPATED TO UTILIZE THE AMERICAN RECOVERY AND REINVESTMENT ACT (ARRA) OF 2009 FUNDING IF IT IS DETERMINED THAT RESPONSIBLE SOURCES CAN SATISFY THE REQUIREMENT. All responsible sources are encouraged to respond to this notice; however, sources that do not respond shall not be precluded from responding to any subsequent solicitation. The National Institute of Standards and Technology (NIST) seeks a dual chamber molecular beam epitaxy machine to augment its ability to provide measurements and standards to the electronics and electrical engineering community. In particular a fully automated system with one III-arsenide/phosphide chamber and one III-nitride chamber is desired. Only new instruments will be considered. Responses from responsible sources should clearly establish capability of providing Dual Chamber MBE Machine. After results of this market research are obtained and analyzed and specifications are developed, NIST may conduct a competitive procurement and subsequently award a Purchase. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that results would be conducted as a small business set-aside. NIST requires a Dual Chamber MBE Machine that meets or exceeds the following requires: Technical Requirements: A. Fully automated Cluster Tool with Bakeout System B. Load lock with Degas heater C. Sample preparation chamber with hydrogen cleaning. D. GaN Growth System 1. Single 3" wafer with automatic transfer from cluster. 2. Manipulator with sufficient heater power and cooled shielding to achieve silicon wafer temperature of 1000°C. 3. Ten source ports configured as follows (all cells to include suitable electronics and crucibles): a. 2 Ga effusion cells with capacity of at least 85 cc. b. Al effusion cell with cold lip and extended crucible option. c. In effusion cell with capacity of at least 85 cc. d. N2 RF plasma source with optical window for plasma monitoring and optimized aperture, including mass flow controller, vent/run valving, point-of-use purifier on run/bypass manifold, RF power supply, autotune control and recipe software control of ignition and power levels. e. Si effusion cell (dopant). f. Mg effusion cell (dopant). g. Gas injector for NH3; separate gas injector for gaseous dopant sources (Si2H6, etc.) 4. Optical access ports with shutters and heaters for atomic absorption spectroscopy (through path just below manipulator main shutter) and for spectral ellipsometry. E. Arsenide/Phosphide System 1. Single 3" wafer with automatic transfer from cluster. 2. Ten source ports configured as follows (all cells to include suitable electronics and crucibles): a. 2 Ga effusion cells with a capacity of at least 85 cc. b. 2 Al effusion cells (cold lip). c. 1 In effusion cells with a capacity of at least 85 cc. d. Valved arsenic cracker, motorized valve controller. e. Si effusion cell (dopant). f. Be effusion cell (dopant). g. Valved phosphorous cracker with motorized valve and phosphorous recovery system. h. CBr4 system (including gas cabinets, MFCs, etc-everything needed for operation). i. The CBr4 injector shall be a "dual cell" with an injector and room for an additional 5 cc crucible. 3. At least 6" diameter port opposite wafer with optical access for pyrometer and related equipment, shuttered and heated. F. Each system will have the following items: a. RHEED, 15 kV and gate valve on screen. b. RHEED analysis hardware and software. c. Band edge thermometer and pyrometer, with optional reflectometer (may be separate units or combined). d. Control software with feedback from in situ tools. e. Bakeout system. Requested Information to be Included in Responses to this Notice: 1. Please indicate whether your company manufactures or is an authorized reseller/business partner for a MBE of any kind and, if so, please provide complete commercial specifications for the MBE that your company manufactures or sells, including the name of the company that manufactures, reconditions, or remanufactures the MBE, where it is manufactured, and detailed functional and performance specifications that the product meets. 2. If your organization is an original equipment manufacturer of MBE, then please provide the name of company(ies) that are authorized by your organization, as the OEM, to sell your organization's ILWS, as well as their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Describe optional items that are available for purchase for the MBE, such as consumables, spares, tools, additional components, ancillary equipment, software licenses, telephone support, etc. 4. Indicate whether modifications of the MBE manufactured or sold by your organization would be necessary to meet Government specifications listed in this notice and, if so, indicate whether those modifications would be considered minor modifications as described in the FAR Subpart 2.101 definition of commercial item. 5. Provide any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Responses to this notice shall be sent by email to Eduardo F. Baca, Support Contractor, at eduardo.baca@nist.gov, with cc: to Patrick Staines at patrick.staines@nist.gov, so that it is received at that email address no later than closing time and date. The responses should include all 5 requests for information listed above. Contracting Office Address: 100 Bureau Drive, Gaithersburg, Maryland 20899-1640 Primary Point of Contact: Eduardo Baca Support Contractor Contract Specialist eduardo.baca@nist.gov Phone: 301-975-6388 Secondary Point of Contact: Patrick Staines, Contracting Officer patrick.staines@nist.gov Phone: 301-975-6335
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