SOURCES SOUGHT
66 -- RECOVERY-Traceable Atomic Force Microscope
- Notice Date
- 4/7/2009
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-09-SS33
- Archive Date
- 5/9/2009
- Point of Contact
- Carol A. Wood, Phone: 301-975-8172, Carol A. Wood,, Phone: 301-975-8172
- E-Mail Address
-
carol.wood@nist.gov, carol.wood@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards and Technology, (NIST), seeks information on commercial vendors that are capable of providing a Traceable Atomic Force Microscope (T-AFM). The goal is to build a traceable atomic force microscope. The instrument will provide fundamental traceable nanoscale length metrology for customers in industries such as semiconductor manufacturing, optics and photonics, data storage, and biomedical among others. The instrument must have a vertical resolution of less than 0.05 nm, and a linearity of no more than 0.01%. The instrument will be used to measure height, pitch, surface roughness, line width roughness (top down). The instrument must have on-board metrology traceable to the SI definition of the meter through the 633 nm wavelength I2-stabilized He-Ne laser in all three axes. The displacement laser interferometry system must monitor the scanning stage motions and must interface with the AFM controller. After results of this market research are obtained and analyzed and specifications are developed for a T-AFM that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small business manufacturers are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. This contemplated procurement is anticipated to utilize Recovery Act Funding if it is determined that responsible sources can satisfy the requirement. The required T-AFM technology must have the following capabilities: 1) A sample stage capable of handling 300 mm wafers; 2) Z-axis range of motion of at least 6 micrometers during measurements; 3) Vertical resolution or root mean square noise level, which ever is greater, of less than 0.05 nm; 4) An x-y scan range of 100 micrometers by 100 micrometers; 5) X, Y, and Z axes linearity less than 0.01% defined as one half of the peak to valley deviations from a straight line divided by the scan range; 6) A closed loop metrology head in z, and x-y; 7) A scanner made of low thermal expansion material such as Invar or Super Invar; 8) A HeNe laser with a stability of at least 110-8 over one hour or better and a lateral position resolution of no more than 0.15 nm; 9) Maximum rotation errors (yaw, pitch and roll) for all axes of less than 0.0013 rad/m after feedback compensation; 10) A straightness error for all axes of less than measurement range after feedback compensation; 11) A stage drift of no more than 1 nm/hour; 12) A stage resonant frequency greater than 400 Hz in x and y directions; greater than 800 Hz in z direction; 13) An Abbe offset of less than 5 mm for the x and y axes; less than 0.5 mm for the z-axis; 14) An x-y non-orthogonality of less than 0.01 degrees; 15) A z-axis non-orthogonality with x-y plane of less than 0.5 degrees; 16) A height repeatability of no more than 0.05 nm (1); 17) Intermittent contact and contact modes of operation; 18) A controller bandwidth of 6MHz or better; 19) Data formats of Binary, ASCII, SDF ; 20) A output data size of at least 2048 X 2048. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company’s size classification in any response to this notice. Companies that manufacture these types of systems are requested to email a detailed report describing their abilities to carol.wood@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications, qualifications of development engineers and/or scieintists and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name and business size of the company that manufactures the system components for which specifications are provided; 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address); 3. Indication of number of days, after receipt of order that is typical for delivery of such systems; 4. Indication of whether each instrument (including installation) for which specifications are sent to carol.wood@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s); 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=a19bc183bf029c9f32efa10465d24766&tab=core&_cview=1)
- Place of Performance
- Address: NIST, 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01787207-W 20090409/090407215356-a19bc183bf029c9f32efa10465d24766 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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