DOCUMENT
A -- Chip-Scale Vacuum Micro Pumps (CSVMP) - Full DARPA-BAA-08-75 document
- Notice Date
- 10/16/2008
- Notice Type
- Full DARPA-BAA-08-75 document
- NAICS
- 541712
— Research and Development in the Physical, Engineering, and Life Sciences (except Biotechnology)
- Contracting Office
- Other Defense Agencies, Defense Advanced Research Projects Agency, Contracts Management Office, 3701 North Fairfax Drive, Arlington, Virginia, 22203-1714
- ZIP Code
- 22203-1714
- Solicitation Number
- DARPA-BAA-08-75
- Archive Date
- 10/30/2009
- Point of Contact
- Dennis L Polla,, Phone: xxxxxxxxxxxx
- E-Mail Address
-
dennis.polla@darpa.mil
- Small Business Set-Aside
- N/A
- Description
- <!--[if gte mso 9]><xml> <w:WordDocument> <w:View>Normal</w:View> <w:Zoom>0</w:Zoom> <w:PunctuationKerning /> <w:ValidateAgainstSchemas /> <w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid> <w:IgnoreMixedContent>false</w:IgnoreMixedContent> <w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText> <w:Compatibility> <w:BreakWrappedTables /> <w:SnapToGridInCell /> <w:WrapTextWithPunct /> <w:UseAsianBreakRules /> <w:DontGrowAutofit /> </w:Compatibility> <w:BrowserLevel>MicrosoftInternetExplorer4</w:BrowserLevel> </w:WordDocument> </xml><![endif]--><!--[if gte mso 9]><xml> <w:LatentStyles DefLockedState="false" LatentStyleCount="156"> </w:LatentStyles> </xml><![endif]--> <!--[if gte mso 10]> <style> /* Style Definitions */ table.MsoNormalTable {mso-style-name:"Table Normal"; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-parent:""; mso-padding-alt:0in 5.4pt 0in 5.4pt; mso-para-margin:0in; mso-para-margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman"; mso-ansi-language:#0400; mso-fareast-language:#0400; mso-bidi-language:#0400;} </style> <![endif]--> DARPA is soliciting innovative research proposals in the area of Chip-Scale Vacuum Micropumps (CSVMP). Proposed research should investigate innovative approaches that enable revolutionary advances in science, fabrication technology, devices, or systems relevant to attaining vacuum conditions on a semiconductor chip. Specifically excluded is research that primarily results in evolutionary improvements to the existing state of practice. New developments in MEMS technologies require the development of microdevices that can provide ultra-low pressures at the chip scale. For example, the performances of micro-resonators, miniature thermally-isolated bolometers, rf switches, and chip-scale ionization based mass detectors would all benefit from revolutionary low-pressure micro-pumps capable of attaining vacuums as low as one microtorr. <!--[if gte mso 10]> <style> /* Style Definitions */ table.MsoNormalTable {mso-style-name:"Table Normal"; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-parent:""; mso-padding-alt:0in 5.4pt 0in 5.4pt; mso-para-margin:0in; mso-para-margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman"; mso-ansi-language:#0400; mso-fareast-language:#0400; mso-bidi-language:#0400;} </style> <![endif]--><!--[if gte mso 9]><xml> <w:WordDocument> <w:View>Normal</w:View> <w:Zoom>0</w:Zoom> <w:PunctuationKerning /> <w:ValidateAgainstSchemas /> <w:SaveIfXMLInvalid>false</w:SaveIfXMLInvalid> <w:IgnoreMixedContent>false</w:IgnoreMixedContent> <w:AlwaysShowPlaceholderText>false</w:AlwaysShowPlaceholderText> <w:Compatibility> <w:BreakWrappedTables /> <w:SnapToGridInCell /> <w:WrapTextWithPunct /> <w:UseAsianBreakRules /> <w:DontGrowAutofit /> </w:Compatibility> <w:BrowserLevel>MicrosoftInternetExplorer4</w:BrowserLevel> </w:WordDocument> </xml><![endif]--><!--[if gte mso 9]><xml> <w:LatentStyles DefLockedState="false" LatentStyleCount="156"> </w:LatentStyles> </xml><![endif]--><!--[if gte mso 10]> <style> /* Style Definitions */ table.MsoNormalTable {mso-style-name:"Table Normal"; mso-tstyle-rowband-size:0; mso-tstyle-colband-size:0; mso-style-noshow:yes; mso-style-parent:""; mso-padding-alt:0in 5.4pt 0in 5.4pt; mso-para-margin:0in; mso-para-margin-bottom:.0001pt; mso-pagination:widow-orphan; font-size:10.0pt; font-family:"Times New Roman"; mso-ansi-language:#0400; mso-fareast-language:#0400; mso-bidi-language:#0400;} </style> <![endif]--> DARPA will post a consolidated Question and Answer response after November 24, 2008, before final full proposals are due. In order to receive a response to your question, submit your question by November 17, 2008 to the BAA08-75@darpa.mil. All administrative correspondence and questions on this solicitation, including requests for information on how to submit a full proposal to this DARPA BAA, should be directed to BAA08-75@darpa.mil. Full DARPA-BAA-08-75 document is attached.
- Web Link
-
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- Document(s)
- Full DARPA-BAA-08-75 document
- File Name: Full DARPA-BAA-08-75 document (csvmp_darpa_baa_08_75_for_posting_16oct08.pdf)
- Link: https://www.fbo.gov//utils/view?id=059f70ab8950e1f8b4890f9e0ad5062a
- Bytes: 489.06 Kb
- Note: If links are broken, refer to Point of Contact above or contact the FBO Help Desk at 877-472-3779.
- File Name: Full DARPA-BAA-08-75 document (csvmp_darpa_baa_08_75_for_posting_16oct08.pdf)
- Record
- SN01692598-W 20081018/081016214744-e77ed7bd0eb2842fa03b18ba96729db4 (fbodaily.com)
- Source
-
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