SOURCES SOUGHT
66 -- Stand-Alone Direct-Write Electron Beam Lithography System
- Notice Date
- 5/14/2008
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-08-0012
- Point of Contact
- Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
todd.hill@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing a stand-alone direct-write electron beam lithography system in support of several on-going scientific and technical research projects in the Center for Nanoscale Science and Technology (CNST) laboratory. The system will be sited and used in a multi-user facility. After results of this market research are obtained and analyzed and specifications are developed for an electron beam lithography system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. NIST has a need for a stand-alone direct write electron beam lithography system that would meet the following requirements: 1.RESOLUTION: Minimum single write line of dimension 12 nanometers or less in a commercially available e-beam resist; 2.ACCELERATING VOLTAGE: Capability to operate the electron column at 50 kilovolts (keV) or higher accelerating voltage; 3.SUBSTRATE CAPABILITY: System should be capable of handling substrates from small piece parts up to and including wafer rounds of at least 100 millimeters in diameter or larger; 4.MECHANICAL STAGE: System shall be designed with a laser-based interferometrically controlled stage positioning system capable of 1 nanometer precision or better. Stage travel shall be at least 100 millimeters in both x- and y-directions; 5.SOFTWARE: Operating control of instrument shall be GUI-based facilitating ease of use to perform all necessary lithography operations; 6.MANUALS: The system shall provide all manuals necessary to operate and maintain the system; 7. DELIVERY and INSTALLATION: the delivery and installation of the system should be able to be completed in less than 9 months ARO: 8. PAST PERFORMANCE: Any and all systems proposed shall have a documented history of at least five prior system installed and operating in the field. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 333314, as those domestic sources having 500 employees or less. Please include your company’s size classification in any response to this notice. Companies that manufacture a direct write electron beam lithography system are requested to email a detailed report describing their abilities to todd.hill@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such a system. 4. Indication of whether each instrument for which specifications are sent to todd.hill@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=065074e5e19a4252113dc33d5d01cebe&tab=core&_cview=1)
- Place of Performance
- Address: NIST, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01573527-W 20080516/080514221454-065074e5e19a4252113dc33d5d01cebe (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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