SOLICITATION NOTICE
66 -- OPTICAL SURFACE PROFILER AND DYNAMIC ACTUATION ANALYZER SYSTEM
- Notice Date
- 6/21/2007
- Notice Type
- Solicitation Notice
- NAICS
- 333314
— Optical Instrument and Lens Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC07ZRI022Q
- Response Due
- 7/8/2007
- Archive Date
- 6/21/2008
- Small Business Set-Aside
- N/A
- Description
- NASA/GRC has a requirement for the purchase of an OPTICAL SURFACE PROFILER AND DYNAMIC ACTUATION ANALYZER SYSTEM. The specifications follow. This notice is a combined synopsis/solicitation for commercial item(s) prepared in accordance with the format in FAR part 12, as supplemented with additional information included in this notice. This procurement is being conducted under the Simplified Acquisition Procedures (SAP) set forth in FAR Part 13. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Quote (RFQ) for the purchase of an Optical Surface Profiler and Dynamic Actuation Analyzer System. Statement of Work follows: Statement of Work: MEMS Optical Surface Profiler and Dynamic Actuation Analyzer System Dynamic Actuation Analyzer ? Laser Doppler Vibrometer: o The system shall measure out-of-plane vibrations of MEMS devices using a small spot size laser to measure dynamic performance. The system shall measure this dynamic performance at a single spot on the device being tested. The laser spot shall be sized from 1.2 m to 3.6 m, depending on which objective is used. o The system shall provide data acquisition of frequencies from 1Hz to 1MHz. o The system shall include measurement and recording of displacement, and calculation of velocity and acceleration using direct digitization and purely numerical digital demodulation of the Doppler signal. o There shall be a 7-level dimmer for the laser spot, controlled by software. Laser power for the spot shall not exceed 1mW. o System shall have differential scanning vibrometry capability, which shall provide measurements at two locations: (1) the location of the actual measurement, which can be scanned over the surface, and (2) a fixed location to cancel out any room or floor vibrations. o System shall display frequency-domain response of measured actuation devices. o Shall provide long range NIR objectives: 5X (with working distance of 37.5 mm or greater and field of view of 1.8 x 1.34 mm2 or greater), 10X (with working distance of 30.5 mm or greater and field of view of 0.9 x 0.67 mm2 or greater), and 20X (with working distance of 20 mm or greater and field of view of 0.45 x 0.335 mm2 or greater). o Velocity Measurement (Digital): Shall provide measurements of velocities up to 405 mm/s . o Piezo-objective translation stage: shall have a travel range of up to 250m or greater. Optical Profilometer ? White light interferometry o The system shall provide full-field static topography of samples. o Measurement performance (Resolution using phase evaluation): ? At 10 nm step size: Shall provide 28 pm (rms) or less resolution and accuracy of 0.9 nm or less. ? At 130 nm step size: Shall provide 50 pm (rms) or less resolution and accuracy of 2.9 nm or less. o Measurement performance (Resolution using envelope evaluation): ? At 10 nm step size: Shall provide 525 pm (rms) or less resolution and accuracy of 16 nm or less. ? At 130 nm step size: Shall provide 1.95 nm (rms) or less resolution and accuracy of 62 nm or less. o Measurement performance on a traceable calibrated standard: ? Repeatability for 20 step height measurements shall be 0.03% (rms) or less. ? Accuracy shall be 0.25% or less. o Shall provide three interference objectives: 5X (with optical resolution of 3.6 m or less and working distance of 9.3 mm or greater); 10X (with optical resolution of 1.6 m or less and working distance of 7.4 mm or greater); and 20X (with optical resolution of 1.2 m or less and working distance of 4.7 mm or greater). Measurement System ? Shall be compatible with Mitutoyo FS70-L-S back plate based probe stations for mounting on Mitutoyo FS70-L-S compatible probe stations. Data Management System ? Computer (minimum configuration): o 3.6 GHz CPU based PC with 1 GB RAM, or greater with Windows XP o 160 GB HDD or larger, 3.5? floppy disk drive, combined DVD (8X) recorder and CD (32X) o 19? flat panel color monitor o Professional graphics board with VIVO o IEEE 1394 Firewire adapter for acquisition of video from progressive scan camera o Ethernet LAN o Dual-channel 16 bit D/A converter for scanner control o Four-channel A/D converter with 1 MHz max. vibration bandwidth (12-16 bit sampling (dependent on bandwidth selected)) o 1 channel waveform generator o 1 MHz digital external trigger o RS-232 interface for communication with vibrometer controller Software ? Out of Plane Measurements Data Acquisition o Live full field video display with laser spot, scan area, and analyzer displays and laser positioning with mouse, reference laser positioned by thumbwheels o Ability to provide up to 512 x 512 definable scan points o Control of vibrometer parameters via RS-232 interface o Waveform excitation including sine, periodic chirp, white noise, random signals, sweep, and arbitrary user defined signals o Fast acquisition mode (up to 50 points/sec) at a single frequency with definable bandwidth o Gate input for gated scan control o Trigger control with automatic and manual thresholds, rising and falling edge o Complex and magnitude averaging of spectra, peak hold, time o 6400 FFT lines o Rectangular, Hamming, Hanning, flat top, Blackman Harris, Bartlett, Exponential window functions ? Out of Plane Measurement Data Processing and Analysis o Color, filled contours and 3D maps over stored video image o Bode or Nyquist plots at each point o ASCII, Universal File Format, ME?scope data transfer o AVI, JPEG, BMP, TIFF graphics transfer o Spectral analysis including magnitude, magnitude (dB), phase, real, imaginary, frequency response, auto power, cross power, coherence, 3rd octave analysis o Capability to fully automate software via Visual Basic scripting ? Topography Measurement Data Acquisition o Measurement with envelope, short coherent measurement o Acquisition of video via FireWire IEEE1394 ? Topography Measurement Data Processing and Analysis o Envelope or phase evaluation o Polynomial fit, linear regression, subtracting, averaging, filters, masking functions for data evaluation o Surface view with 2D and 3D views o Profile view with profile sections, roughness and waviness, parallelism, angle, height, radius o Data transfer via image or ASCII files Workstation ? Vibration Isolation o Shall include vibration isolation optical table platform to isolate surface profiler from external vibration with active air vibration damping. o Shall include work surface with 1 inch hole-spacing. ? Shall include a stand that holds above vibration isolation surface, provides a mount for monitor, and provides BNC connectors. ? Shall include a 19? system cabinet with wheels to hold associated data management system and vibrometer controller. ? Z-travel adjustment unit shall provide 50 mm travel. Installation / Training ? Shall provide installation and on-site training of system, including system set-up, inspection, and training for 2 days. Delivery/Installation  Shall be FOB Destination to NASA Glenn Research Center, 21000 Brookpark Road, Cleveland Oh 44135.  Installation shall be at NASA Glenn Research Center, 21000 Brookpark Rd, Cleveland, OH 44135, Building 77, Room 311. Offers for the item(s) described above are due by July 8, 2007, 4:30p.m. GRC local time and may be mailed to NASA Glenn Research Center, 21000 Brookpark Road, MS 500-305, Cleveland, OH 44135, and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), Cage Code, taxpayer identification number (TIN) and other Representations and Certifications (52.212-3), identification of any special commercial terms, description of items offered per FAR 52.212-1-Instructions to Offerors-Commercial Items and as modified, and be signed by an authorized company representative. A copy of a published price list, catalog price or computer page printout showing the price for requested items may also be included if desired. (Note, the Contracting Officer may request this information if only 1 source provides a proposal). Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form. This form may be obtained via the internet at URL: Informed : ftp://ftp.hq.nasa.gov/forms/form/sf1449.itp PDF : ftp://ftp.hq.nasa.gov/forms/pdf/sf1449.pdf Faxed offers are not acceptable due to the required information of 52.212-1. Offerors shall provide the information required by FAR 52.212-1 as amended and the following: 52.212-1 (b) amendment: All offerors shall include full and complete product specifications including technical specifications on all components. Offerors shall also include a list of at least three (3) recent sales of identical or similar equipment, including contact information for the customer, so the Government can verify past performance. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the Offerors shall so state and shall list the country of origin. Offerors must provide a completed copy of 52.212-3, Offeror Representation and Certifications - Commercial Items with their quote. FAR 52.2l2-3 may be obtained via the internet at URL: http://www.grc.nasa.gov/WWW/Procure/rforms.html FAR 52.212-4 (Feb 2002), Contract Terms and Conditions-Commercial Items is applicable. FAR 52.212-5 (Apr 2003), Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items is applicable. The FAR may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than June 29, 2007. Telephone questions will NOT be accepted. Prospective quoters shall notify this office of their intent to submit a quotation. Ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any) and for downloading their own copy of this combination synopsis/solicitation and amendments http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=C&pin=22 Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html
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