SOURCES SOUGHT
66 -- Vacuum Deposition Sputtering System and Vacuum Physical Vapor Deposition System
- Notice Date
- 5/23/2007
- Notice Type
- Sources Sought
- NAICS
- 339111
— Laboratory Apparatus and Furniture Manufacturing
- Contracting Office
- Department of Energy, Brookhaven National Laboratory (DOE Contractor), Brookhaven, PO Box 5000 Bldg. No. 355, Upton, NY, 11973, UNITED STATES
- ZIP Code
- 00000
- Solicitation Number
- VDS118909
- Response Due
- 6/18/2007
- Archive Date
- 7/3/2007
- Description
- Brookhaven Science Associates plans to acquire a Vacuum Deposition Sputtering System (VDS) tool and a Vacuum Physical Vapor Deposition System (VPVD) for the Nanopatterning Laboratory of the Center for Functional Nanomaterials at BNL. This equipment will be used for the deposition of metallic, semiconducting, and insulating thin films and is more fully described in the specifications contained in the attached RFP. Sellers may submit offers on either system or both systems. For the purpose of this procurement, it is not necessary to provide offers for both systems. This, acquisition, is a, ?Best Value?, procurement. The utilization of this procedure is expected to provide the greatest overall benefit to BSA/BNL. ?Best Value? employs a trade off process that permits award to other than the lowest priced offeror or to the highest technically rated offeror. The tradeoff process, associated with Best Value involves a comparative weighing of the evaluation factors and sub-factors identified in the Request for Proposals (RFP). Specifically, the trade off process involves selecting the most advantageous offer based upon an integrated assessment of both non-cost/price factors, taken in their assigned relative importance. The following factors, in their relative order of weighting, will be utilized to evaluate the offers: 1. Technical Specification Compliance System 1 - Vacuum Deposition Sputtering System: Sellers must supply detailed descriptions of performance and capabilities and dimensioned layout drawings of the VDS, the materials used in its construction, failure rate data and, where applicable, manufacturer?s specifications of subsystems such as vacuum chamber, pumps, mass flow controllers, sputtering heads, and e-beam guns, so as to permit BSA to evaluate each offer. The primary components listed below will be rated for operational capability, construction quality, and cost. Benchmark specifications are quoted in the VDS specification. The following requirements have equal importance in the evaluation. a. Front-loading vacuum chamber b. Vacuum pumping package c. Computer controls. d. An electron beam deposition source e. Sputtering sources f. A rotation-heating stage g. A film thickness monitor System 2 - Vacuum Physical Vapor Deposition System Sellers must supply detailed descriptions of performance and capabilities and dimensioned layout drawings of the VPVD, the materials used in its construction, failure rate data and, where applicable, manufacturer?s specifications of subsystems such as vacuum chamber, pumps, mass flow controllers, and e-beam guns, so as to permit BSA to evaluate each offer. The primary components listed below will be rated for operational capability, construction quality, and cost. Benchmark specifications are quoted in the VPVD specification. The following requirements have equal importance in the evaluation. a. Physical Characteristics b. Vacuum System c. Film Deposition System d. Sample Mount e. Safety: 2. System Support VDS/VPVD - Operating Manuals - Warranty - Training - Service Coverage 3. Performance Risk VDS/VPVD production and installations - Relevant Experience - Quality of Work - Timeliness of Performance Proposals are due June 18, 2007 by 4:00 PM, Local Time, and shall be submitted to Brookhaven Science Associates, Brookhaven National Laboratory, Attention: D. Paveglio, Bldg. 830M, Upton, NY 11973, by US mail. This RFP has been sent to the following known manufacturers: Kurt J. Lesker, Clairton, PA BOC Edwards, Ontario, Canada All other interested Vendors may download the full RFP from this web site.
- Place of Performance
- Address: Brookhaven National Laboratory, Upton, NY
- Zip Code: 11973
- Country: UNITED STATES
- Zip Code: 11973
- Record
- SN01301142-W 20070525/070523220556 (fbodaily.com)
- Source
-
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