MODIFICATION
66 -- Ultra High Vacuum Ga Ion Column
- Notice Date
- 8/23/2005
- Notice Type
- Modification
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-05-R-LS03
- Response Due
- 8/24/2005
- Archive Date
- 8/23/2006
- Description
- The combined synopsis/solicitation previously issued for the procurement of the following: Contract Line Item Number (CLIN) 0001, An Ultra High Vacuum (UHV) Ga Ion Column for Scanning Auger Microscope and Secondary Ion Mass Spectroscopy (SIMS); SubCLIN 0001AA UHV Ion Column, 1 EA; SubCLIN 0001AB Installation, 1 LO; SubCLIN 0001AC Training, 1 LO; CLIN 0002 Operation and Maintenance Manuals, 1 LO. is hereby modified as follows: REPLACE: The focused (less than 50 nm) ion beam position on the sample must be able to be controlled in X and Y using two external voltage sources. 1 mm deflection of the ion beam must be possible in both X and Y directions using external voltage sources. The purpose of controlling the beam position is for ion beam lithography, and thus the beam deflection must be suitable for a range of lithography write field areas from 1 mm maximum deflection to less than 0.1 micron area; WITH: The focused (less than 50 nm) ion beam position on the sample must be able to be controlled in X and Y using two external voltage sources. 1 mm deflection of the ion beam must be possible in both X and Y directions using external voltage sources. The purpose of controlling the beam position is for ion beam lithography, and thus the beam deflection must be suitable for a range of lithography write field areas from 500 microns maximum deflection to less than 0.1 micron area.
- Place of Performance
- Address: Naval Research Laboratory, Washington DC
- Zip Code: 20375-5326
- Country: USA
- Zip Code: 20375-5326
- Record
- SN00877408-W 20050825/050823213005 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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