SOLICITATION NOTICE
66 -- DEFLECTOMETER
- Notice Date
- 8/19/2004
- Notice Type
- Solicitation Notice
- NAICS
- 334515
— Instrument Manufacturing for Measuring and Testing Electricity and Electrical Signals
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC04076539Q
- Response Due
- 8/25/2004
- Archive Date
- 8/19/2005
- Point of Contact
- Nikki D Brown, Contract Specialist, Phone (216) 433-6036, Fax (216) 433-2480, Email Nikki.D.Brown@grc.nasa.gov
- E-Mail Address
-
Email your questions to Nikki D Brown
(Nikki.D.Brown@grc.nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Quotations (RFQ) for one in-situ deflectometer to measure the radius of curvature of semiconductor waters in a Veeco D125LDM organo metallic vapor phase epitaxy (OMVPE) tool The Contractor shall provide a deflectometer that complies with the following specifications: 1) The system shall be compatible with a Veeco D125LDM OMVPE tool using a 3x2 wafer carrier (i.e. a wafer platter containing three (3) 2? diameter wafers) 2) The system shall be based on a fixed laser operating in the 600nm to 700nm wavelength range and a position sensitive detector. 3) The system shall have a minimum data acquisition rate of 15kHz 4) The system shall have a spot size no greater than 0.5mm diameter 5) The system shall mount to a 1.33? flange located on the flow flange top of the D125 tool 6) The system shall demonstrate < 0.02% noise in reflectivity measurement. 7) The system shall be capable of measuring wafer tilt angles of +/- 0.4 degrees with a noise of < 1e-4 degrees. 8) The system shall be capable of measurements from 500 RPM to >1500 RPM of wafer carrier rotation 9) The system shall include a dedicated PC for data acquisition and analysis 10) The control system shall be capable of interfacing to the control computer for the Veeco D125LDM tool to allow automated synchronization of data acquisition with tool operations 11) The control system shall provide a continuous display of average reflectivity and wafer tilt for all wafers on the carrier as well as a chart to provide specific reflectivity and tilt information on individual wafers. 12) The control system shall provide a time line chart displaying average reflectivity and wafer curvature and shall include time markers supplied by the Veeco D125 control system indicating user defined points in the growth process. 13) The system shall be capable of being programmed to ignore dummy wafers placed on the wafer carrier 14) The system shall be supplied with all necessary components to permit calibration and alignment 15) The system shall store all collected data for future analysis. 16) The system shall operate on U.S. standard power (110Vac, 60Hz) The provisions and clauses in the RFQ are those in effect through FAC 01-24 The NAICS Code and the small business size standard for this procurement are 334515 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. Delivery to NASA Glenn Research Center is required within 2 months ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9 Offers for the items(s) described above are due by August 25, 2004 and must be mailed to NASA Glenn Research Center, 21000 Brookpark Road, MS 500-305, Cleveland, OH 44135, and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form (attached). Offerors shall provide the information required by FAR 52.212-1 (JAN 2004), Instructions to Offerors-Commercial, which is incorporated by reference. Award will be based upon overall best value to the Government among those offers that meet the specifications above. Consideration will be given to the factors of meeting specifications, total price, and past performance. Unless otherwise stated in the RFQ, for selection purposes, specifications, total price, and past performance are essentially equal in importance. Technical acceptability will be determined by information submitted by the offeror providing a description in sufficient detail to show that the product offered meets the Government's requirement (see specifications above) and any best value criteria the offeror wishes to address. It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Best value consideration will be given to offerors that: Are able to provide past performance data, specifically copies of journal or conference publications in which your instrument has been used with a Veeco (or Emcore) OVMPE tool, or a summary including how many Deflectometers the Contractor has furnished to other firms and successfully mating them to a Veeco or Emcore OVMPE tool in the last 3 years. CLAUSES: If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the Offerors shall so state and shall list the country of origin. NASA FAR Clauses: (1) 1852.215-84 Ombudsman (OCT 2003) (In paragraph b, insert ?see http://ec.msfc.nasa.gov/hq/library/Omb.html for the name, address, telephone number, facsimile number, and e-mail address of installation ombudsman?) (2) 1852.225-70 Export Licenses (FEB 2000) FAR Clauses: 52.204-7 Central Contractor Registration (Oct 2003) 52.212-4 Contract Terms and Conditions ? Commercial Items (Oct 2003) 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-- Commercial Items (Oct 2003) 52.211-6 Brand name or equal 11.107 (a) As prescribed in 12.301(b)(4), insert the following clauses: (1) 52.203-6 Restrictions on Subcontractor Sales to the Government, with Alternate I (Oct 1995) (41 U.S.C. 253g and 10 U.S.C. 2402). (2) __ 52.219-3 Notice of Total HUBZone Small Business Set-Aside (Jan 1999). (3) __ 52.219-4 Notice of Price Evaluation Preference for HUBZone Small Business Concerns (Jan 1999) (if the offeror elects to waive the preference, it shall so indicate in its offer). (4) __ 52.219-5 Very Small Business Set-Aside (June 2003) (Pub. L. 103-403, section 304, Small Business Reauthorization and Amendments Act of 1994). __ Alternate I (Mar 1999) of 52.219-5. __ Alternate II (June 2003) of 52.219-5. (5) _ 52.219-6 Notice of Total Small Business Set-Aside (June 2003) (15 U.S.C. 644). __ Alternate 1 (Oct 1995) of 52.219-6 (6) __ 52.219-7 Notice of Partial Small Business Set-Aside (June 2003) (15 U.S.C. 644). __ Alternate 1 (Oct 1995) of 52.219-7 (7) 52.219-8 Utilization of Small Business Concerns (Oct 2000) (15 U.S.C. 637 (d)(2) and (3)). (8) __ 52.219-9 Small Business Subcontracting Plan (Jan 2002) (15 U.S.C. 637(d)(4)). (9) __ 52.219-14 Limitations on Subcontracting (Dec 1996) (15 U.S.C. 637(a)(14)). (10) __ 52.219-23 Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (June 2003) (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323) (if the offeror elects to waive the adjustment, it shall so indicate in its offer). __ Alternate I (June 2003) of 52.219-23. (11) __ 52.219-25 Small Disadvantaged Business Participation Program-Disadvantaged Status and Reporting (Oct 1999) (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). (12) __ 52.219-26 Small Disadvantaged Business Participation Program-Incentive Subcontracting (Oct 2000) (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). (13) X 52.222-3 Convict Labor (June 2003) (E.O. 11755) (14) X 52.222-19 Child Labor ? Cooperation with Authorities and Remedies (JAN 2004) (E.O. 13126) (15) X 52.222-21 Prohibition of Segregated Facilities (Feb 1999) (16) X 52.222-26 Equal Opportunity (April 2002) (E.O. 11246). (17) X 52.222-35 Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212) (18) X 52.222-36 Affirmative Action for Workers with Disabilities (June 1998) (29 U.S.C. 793). (19) X 52.222-37 Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212). (20) __ 52.223-9 Estimate of Percentage of Recovered Material Content for EPA- Designated Products (Aug 2000) (42 U.S.C. 6962(c)(3)(A)(ii)). __ Alternate I of 52.223-9 (Aug 2000) (42 U.S.C. 6962(i)(2)(C)). (21) X 52.225-1 Buy American Act-Supplies (June 2003) (41 U.S.C. 10a - 10d). (22) 52.225-3 Buy American Act-North American Free Trade Agreement-Israeli Trade Act (JAN 2004) (41 U.S.C. 10a - 10d, 19 U.S.C. 3301 note, 19 U.S.C. 2112 note). __ Alternate I (May 2002) of 52.225-3. __ Alternate II (May 2002) of 52.225-3. (23) __ 52.225-5 Trade Agreements (Oct 2003) (19 U.S.C. 2501, et seq., 19 U.S.C. 3301 note). (24) __ 52.225-13 Restrictions on Certain Foreign Purchases (Oct 2003) (E.o.s, proclamations, and statutes administered by the Office of Foreign Assets Control of the Department of the Treasury). (25) X 52.225-15 Sanctioned European Union Country End Products (Feb 2000) (E.O. 12849). (26) _X_ 52.225-16 Sanctioned European Union Country Services (Feb 2000) (E.O. 12849). (27) __ 52.232-29 Terms for Financing of Purchases of Commercial Items (Feb 2002) (41 U.S.C. 255(f), 10 U.S.C. 2307(f)). (28) __ 52.232-30 Installment Payments for Commercial Items (Oct 1995) (41 U.S.C. 255(f), 10 U.S.C. 2307(f)). (29) __ 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration (Oct 2003) (31 U.S.C. 3332). (30) X 52.232-34 Payment by Electronic Funds Transfer-Other than Central Contractor Registration (May 1999) (31 U.S.C. 3332). (31) __ 52.232-36 Payment by Third Party (May 1999) (31 U.S.C. 3332). (32) __ 52.239-1 Privacy or Security Safeguards (Aug 1996) (5 U.S.C. 552a). (33) X 52.247-34 F.O.B. Destination (NOV 1991) (34) __ 52.247-64 Preference for Privately Owned U.S.-Flag Commercial Vessels (Apr 2003) (46 U.S.C. Appx 1241 and 10 U.S.C. 2631). __ Alternate I (Apr 1984) of 52.247-64. Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). All contractual and technical questions must be in writing (e-mail or fax) to Nikki Brown not later than August XX, 2004. Telephone questions will not be accepted. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm
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