SOLICITATION NOTICE
66 -- 3D PHASE SHIFT INTERFEROMETER SYSTEM
- Notice Date
- 7/1/2004
- Notice Type
- Solicitation Notice
- NAICS
- 334519
— Other Measuring and Controlling Device Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC04061714
- Response Due
- 7/12/2004
- Archive Date
- 7/1/2005
- Point of Contact
- Glen M. Williams, Contracting Officer, Phone (216) 433-2885, Fax (216) 433-2480, Email Glen.M.Williams-1@nasa.gov
- E-Mail Address
-
Email your questions to Glen M. Williams
(Glen.M.Williams-1@nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Offer (RFO) for: Item 1) one 3D Phase Shift Interferometer System including one set of documentation. Item 1 The 3D Phase Shift Interferometer System shall meet the following specifications: The 3D imaging system described herein shall be usable to measure the film thickness and index of refraction of thin ferroelectric films as a function of electric field, and other materials. Amplitude and phase information from the optical measurement shall be preserved. It shall also be usable to inspect micro-electromechanical systems (MEMS), lip formation in photolithographic lift-off processes, etc. Hence, the instrument system shall combine certain features of an optical microscope, ellipsometer, and phase shift interferometer. As a minimum set of specifications, the 3D imaging system shall have the following properties and capabilities: 1. No sensitivity to vibration in the Z axis. 2. The phase shift interferometer shall use a liquid crystal based optical manipulator in the optical axis (it shall NOT use a conventional interferometry reference beam, hence no reference mirror is required). 3. At least three different coherent wavelengths shall be available for the measurements for characterizing index of refraction behavior. Wavelength shall be selectable by the operator. 4. The measurements shall be able to be made through glass (CaFl) up to 3.0 mm thick. (This feature is intended for future cryogenic measurements wherein the sample will be placed in a thin (less than 0.75 inch) cryostat equipped with a small window. The cryostat will be placed between the objective and the test stage.) 5. Z axis resolution better than or equal to 1 nm. 6. Z axis accuracy better than or equal to 5 nm. 7. Z axis measurement range up to 7 microns. 8. Optical lateral resolution from 0.4 up to 3.5 microns depending on the objective lens. 9. Field of view from 0.05 mm to 1.0 mm, depending on the objective. 10. Color CCD camera 11. Self-contained application software and controller. 12. Documentation: 1 set of operating instruction/maintenance manuals that, as a minimum, instructs in the safe set-up, calibration, and operation of the system, and associated software, and the normal preventative maintenance procedures required. Documentation in electronic format (CD, Web-based, etc.) may be provided in addition to a paper copy. Solicitation Instructions The provisions and clauses in the RFQ are those in effect through FAC 01-24. The NAIC code is 334519 and the small business size standard for this procurement is 500 employees. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to NASA Glenn Research Center is desired within 60 days of award. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Offers for the items(s) described above are due by July 12, 2004, 4:30p.m. GRC local time and may be mailed to NASA Glenn Research Center, 21000 Brookpark Road, MS 500-306, Cleveland, OH 44135 (mark solicitation number on outside of envelope), and include FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), Cage Code, taxpayer identification number (TIN) and other Representations and Certifications (52.212-3), identification of any special commercial terms, description of items offered per 52.212-1, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form attached to this solicitation (Ensure that the ?track changes? feature is turned off when word processing this form). Faxed offers are not acceptable. Offerors shall provide the information required by FAR 52.212-1 and the following: A copy of a published price list, catalog price or computer page printout showing the price for a new Item 1 shall also be included. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the Offerors shall so state and shall list the country of origin. Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc. These representations and certifications will be incorporated by reference in any resultant contract. Alternate sites to download Representation and Certifications - Commercial Items may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/midrange/ or http://www.grc.nasa.gov/WWW/Procure/rforms.html FAR 52.212-4 is applicable. FAR 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-- Commercial Items is applicable. As prescribed in 12.301(b)(4), insert the following clauses: _X_ (1) 52.203-6, Restrictions on Subcontractor Sales to the Government (Jul 1995), with Alternate I (Oct 1995) (41 U.S.C. 253g and 10 U.S.C. 2402). __ (2) 52.219-3, Notice of Total HUBZone Set-Aside (Jan 1999) (15 U.S.C. 657a). __ (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (Jan 1999) (if the offeror elects to waive the preference, it shall so indicate in its offer) (15 U.S.C. 657a). __ (4)(i) 52.219-5, Very Small Business Set-Aside (June 2003) (Pub. L. 103-403, section 304, Small Business Reauthorization and Amendments Act of 1994). __ (ii) Alternate I (Mar 1999) of 52.219-5. __ (iii) Alternate II (June 2003) of 52.219-5. __ (5)(i) 52.219-6, Notice of Total Small Business Set-Aside (June 2003) (15 U.S.C. 644). __ (ii) Alternate I (Oct 1995) of 52.219-6. __ (iii) Alternate II (Mar 2004) of 52.219-6. __ (6)(i) 52.219-7, Notice of Partial Small Business Set-Aside (June 2003) (15 U.S.C. 644). __ (ii) Alternate I (Oct 1995) of 52.219-7.__ (iii) Alternate II (Mar 2004) of 52.219-7. __ (7) 52.219-8, Utilization of Small Business Concerns (May 2004) (15 U.S.C. 637(d)(2) and (3)). __ (8)(i) 52.219-9, Small Business Subcontracting Plan (Jan 2002) (15 U.S.C. 637(d)(4). __ (ii) Alternate I (Oct 2001) of 52.219-9. __ (iii) Alternate II (Oct 2001) of 52.219-9. __ (9) 52.219-14, Limitations on Subcontracting (Dec 1996) (15 U.S.C. 637(a)(14)). __ (10)(i) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (June 2003) (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323) (if the offeror elects to waive the adjustment, it shall so indicate in its offer). __ (ii) Alternate I (June 2003) of 52.219-23. __ (11) 52.219-25, Small Disadvantaged Business Participation Program-Disadvantaged Status and Reporting (Oct 1999) (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). __ (12) 52.219-26, Small Disadvantaged Business Participation Program-Incentive Subcontracting (Oct 2000) (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). __ (13) 52.219-27, Notice of Total Service-Disabled Veteran-Owned Small Business Set-Aside (May 2004). __ (14) 52.222-3, Convict Labor (June 2003) (E.O. 11755). __ (15) 52.222-19, Child Labor-Cooperation with Authorities and Remedies (Jan 2004) (E.O. 13126). _X_ (16) 52.222-21, Prohibition of Segregated Facilities (Feb 1999). _X_ (17) 52.222-26, Equal Opportunity (Apr 2002) (E.O. 11246). _X_ (18) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212). _X_ (19) 52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793). _X_ (20) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212). __ (21)(i) 52.223-9, Estimate of Percentage of Recovered Material Content for EPA-Designated Products (Aug 2000) (42 U.S.C. 6962(c)(3)(A)(ii)). __ (ii) Alternate I (Aug 2000) of 52.223-9 (42 U.S.C. 6962(i)(2)(C)). __ (22) 52.225-1, Buy American Act-Supplies (June 2003) (41 U.S.C. 10a-10d). __ (23)(i) 52.225-3, Buy American Act-Free Trade Agreements-Israeli Trade Act (Jan 2004) (41 U.S.C. 10a-10d, 19 U.S.C. 3301 note, 19 U.S.C. 2112 note, Pub. L. 108-77, 108-78). __ (ii) Alternate I (Jan 2004) of 52.225-3. __ (iii) Alternate II (Jan 2004) of 52.225-3. __ (24) 52.225-5, Trade Agreements (Jan 2004) (19 U.S.C. 2501, et seq., 19 U.S.C. 3301 note). __ (25) 52.225-13, Restrictions on Certain Foreign Purchases (Dec 2003) (E.o.s, proclamations, and statutes administered by the Office of Foreign Assets Control of the Department of the Treasury). _X_ (26) 52.225-15, Sanctioned European Union Country End Products (Feb 2000) (E.O. 12849). __ (27) 52.225-16, Sanctioned European Union Country Services (Feb 2000) (E.O. 12849). ___ (28) 52.232-29, Terms for Financing of Purchases of Commercial Items (Feb 2002) (41 U.S.C. 255(f), 10 U.S.C. 2307(f)). __ (29) 52.232-30, Installment Payments for Commercial Items (Oct 1995) (41 U.S.C. 255(f), 10 U.S.C. 2307(f)). __ (30) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration (Oct 2003) (31 U.S.C. 3332). _X_ (31) 52.232-34, Payment by Electronic Funds Transfer-Other than Central Contractor Registration (May 1999) (31 U.S.C. 3332). __ (32) 52.232-36, Payment by Third Party (May 1999) (31 U.S.C. 3332). __ (33) 52.239-1, Privacy or Security Safeguards (Aug 1996) (5 U.S.C. 552a). __ (34)(i) 52.247-64, Preference for Privately Owned U.S.-Flag Commercial Vessels (Apr 2003) (46 U.S.C. Appx 1241 and 10 U.S.C. 2631).. __ (ii) Alternate I (Apr 1984) of 52.247-64. (c) The Contractor shall comply with the FAR clauses in this paragraph (c), applicable to commercial services, that the Contracting Officer has indicated as being incorporated in this contract by reference to implement provisions of law or Executive orders applicable to acquisitions of commercial items: None Marked as Applicable The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Selection and award will be made to that offeror whose offer meets the specifications of Item 1 above and is the most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. Other critical requirements such as delivery schedule proposed shall also be considered Technical acceptability will be determined by information submitted by the offeror providing a description in sufficient detail to show that the product offered meets the Government's requirement (see specifications above). It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Unless otherwise stated in the solicitation, for selection purposes, specifications, total price, and past performance are essentially equal in importance. Questions regarding this acquisition shall be submitted in writing no later than 3 days after the posting date of this notice. Ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html
- Web Link
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- Record
- SN00614273-W 20040703/040701212923 (fbodaily.com)
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