SOLICITATION NOTICE
36 -- High Vacuum Coating Deposition System
- Notice Date
- 5/12/2004
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of the Navy, Naval Air Systems Command, Naval Air Warfare Center Weapons Division Dept.1, Commander, NAWCWD, Code 210000D, 429 E. Bowen Rd - Stop 4015, China Lake, CA, 93555-6108
- ZIP Code
- 93555-6108
- Solicitation Number
- N68936-04-T-0111
- Response Due
- 5/28/2004
- Archive Date
- 6/12/2004
- Point of Contact
- Jane Price, Contract Specialist, Phone (760) 939-5124, Fax (760) 939-4241, - Doreen Robbins, Procuring Contracting Officer, Phone (760) 939-9665, Fax (760) 939-4241,
- E-Mail Address
-
jane.price@navy.mil, doreen.robbins@navy.mil
- Description
- The Naval Air Warfare Center Weapons Division (NAWCWD), China Lake, CA intends to enter into negotiations for a firm fixed price contract on an other than full and open competition basis to CHA Industries, 4201 Business Center Drive, Fremont, CA 94538-6357 for a Mark 50T High Vacuum Coating Deposition System (one each) to include training and installation. The Mark 50T with its vertical rolling slide-down front door is the only system with the required capacity that has a small enough footprint to meet the government?s size and laboratory space limitation of 15 feet long by 10 feet deep with an additional couple of feet clearance for access to back panels and pumps and is compatible with the government?s CHA Industries Mark 50C e-beam evaporation system utilizing the same substrate holders and rotating lift-off fixturing. The Mark 50T is an ion-assisted, four cathode, magnetron sputter coating chamber with specifications that include: water cooled, 32 x 32-inch process chamber with water cooled swing down front door and removable, water-cooled rear door, four four-inch AJA International magnetron sputter cathodes, one configured to sputter magnetic materials, four 1250W RF power supplies with automatic matching networks, 5 kW resistive thermal source, Kaufman and Robinson EH400HC ion source or the new Kaufman Robinson linear array ion source, shutters for all sources, four 4kW heater lamp array, four gas mass flow controllers with positive shutoffs, 18x18x24-inch stainless steel pumping module with 25 liter liquid nitrogen trap and 1900 liter/sec turbomolecular pump with dry mechanical rough pump, ultimate vacuum of less than 1x10-7 torr in less than five hours, Inficon IC/5 deposition controller, dual ionization gauges and controller, quartz crystal monitors for each sputter cathode and thermal source, automatic valve sequence controller, servo-controlled throttle valve and customer specified lift-off fixturing capable of holding up to 14-inch diameter substrates with a total weight of no more than 250lbs while rotating the substrates at up to 20 rpm at 300 degrees centigrade. Delivery of the items is FOB destination to the Naval Air Warfare Center Weapons Division China Lake, CA 6 months after receipt of order. Award will be issued under the authority of the test program for commercial items (FAR 13.5). This requirement is limited to CHA Industries for the compatibility with an existing CHA Industries Mark 50C, compatibility to fit limited laboratory floor space, and substrate size and weight handling capability with the same system footprint as the Mark 50T. Any firms believing they can provide a high vacuum coating deposition system as the CHA Mark 50T, clearly showing the systems ability to be completely compatible to an exiting CHA Mark 50C system, fit into the limited laboratory floor space available and be capable of handling the required substrates size and weight with the same footprint as the Mark 50T may submit a written response to be received at the Contracting Office no later than 15 days after this notification is published. All requests must reference RFQ Number N68936-04-T-0111. These responses shall be submitted in writing to Naval Air Warfare Center Weapons Division, Code 210000D, Attn: Jane Price, 429 E. Bowen Road, Stop 4015, China Lake, CA 93555-6108. Questions may be addressed to Jane Price (760) 939-5124 or Doreen Robbins (760) 939-9665.
- Place of Performance
- Address: N/A
- Record
- SN00584799-W 20040514/040512212354 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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