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FBO DAILY ISSUE OF JANUARY 31, 2004 FBO #0795
SOLICITATION NOTICE

66 -- Semiconductor Spin Rinse Dryers

Notice Date

1/29/2004
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-04-Q-0211
 

Response Due

2/12/2004
 

Archive Date

2/27/2004
 

Point of Contact

Erin Hawley, Contract Specialist, Phone 301-975-6304, Fax 301-975-8884, - Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884,
 

E-Mail Address

Erin.Hawley@nist.gov, carol.wood@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2001-19. ****The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all responsible Parties may submit a quote. ****The National Institute of Standards and Technology (NIST), has a requirement for two (2) Semiconductor Spin Rinse Dryers to be used by NIST?s Semiconductor Electronics Division in the Advanced Measurement Laboratory Nanofabrication Facility. All interested parties shall provide a quote for the following line item: ****LINE ITEM 0001: Quantity two (2) each Semiconductor Spin Rinse Dryers with the following required elements and specifications: **Systems must be designed for semiconductor applications for use in a class 100 Research and Development Cleanroom; **Systems must be configured as a double, vertical stack with independent controls; **Systems must provide the capability to change out the rotors in order to work in various research projects and accommodate various silicon wafer sizes ranging from 2 inches to 8 inches. The systems must be capable of spinning 3 inch and 4 inch wafers upon delivery; **Systems must provide optional rotors for 6 and 8 inch wafers with a one bolt quick change type of assembly for ease of use and fast rotor change out; **Controls shall have recipe parameters clearly identified on the control panel along with the current status information (i.e. spin speed, time, etc) available from a digital display. The systems shall include diagnostics and complete parameter verification. System memory shall have the capability to store at least one recipe; **System chambers must be electro-polished Stainless Steel, include a brushless DC motor, damped actuation valves, and an Electrostatic discharge device. Preference shall be given to systems that provide a static free process chamber; **The systems shall provide a Deionized Water resistivity monitor so that the rinsing process can be observed and automatically controlled; **Rinsing process shall wash contaminated fluids from the product, the wafer cassette, and the chamber at the same time; **Drying process shall utilize centrifugal acceleration and heated, filtered Nitrogen. Blanket heaters must be positioned on the exterior of the chamber to increase the interior temperature of the process chamber; **Operating voltage shall be 120 volt; **The system must be new and not refurbished. The system will be used in the AML Nanofabrication facility that will be producing world-class research in semiconductors and other fields. The introduction of contaminants into this environment can be detrimental to the successes of the work being conducted in this facility. To prevent the introduction of unwanted contaminates, the system must be purchased new. ****DELIVERY SHALL BE FOB DESTINATION and shall be completed in accordance with the Contractor?s commercial schedule. The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The Contractor shall deliver to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. ****The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, and 3) Price. Technical Capability, and Past Performance, when combined, are more important than Price. ****Evaluation of Technical Capability shall be based on the information provided in the quotation. Quotations shall include the make and model of the products, manufacturer sales literature or other product literature, which CLEARLY DOCUMENTS that the offered product(s) meet or exceed the specifications stated above. ****Past Performance will be evaluated to determine the overall quality of the product and service, provided by the Contractor. Evaluation of Past Performance shall be based on information obtained from the references provided IAW FAR 52.212-1(b)(10) and/ or information provided by NIST or its? affiliates. Quoters shall provide a list of at least THREE (3) REFERENCES to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. ****The following provisions and clauses apply to this acquisition: Provisions: 52.212-1, Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items. Clauses: 52.204-7, Central Contractor Registration (Oct 2003); 52.212-4, Contract Terms and Conditions?Commercial Items: 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders--Commercial Items, including subparagraphs: (13) 52.212-3 Convict Labor; (14) 52.222-19 Child Labor ? Cooperation With Authorities And Remedies; (15) 52.222-21, Prohibition of Segregated Facilities; (16) 52.222-26, Equal Opportunity; (17) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (18) 52.222-36, Affirmative Action for Workers with Disabilities; (19) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (21) (i) 52.225-3, Buy American Act?North American Free Trade Agreement?Israeli Trade Act (41 U.S.C. 10a-10d, 19 U.S.C. 3301 note, 19 U.S.C. 2112 note)with Alternate I; (24) 52.225-13, Restrictions on Certain Foreign Purchases; (30) 52.232-34, Payment by Electronic Funds Transfer?Other than Central Contractor Registration; and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ****All Parties shall submit the following: 1) Two (2) copies of a quotation which addresses all Line Items; 2) Technical description and/or product literature; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); and 5) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded at www.arnet.gov/far. ****All quotes should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Erin M. Hawley, Building 301, Room B175, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. ****Submission must be received by 3:00 p.m. local time on February 12, 2004. FAXED AND EMAILED QUOTATIONS SHALL NOT BE ACCEPTED.
 

Place of Performance

Address: NIST, 100 Bureau Drive, Building 301 Shipping and Receiving, Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00512026-W 20040131/040129211811 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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