Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 25, 2003 FBO #0634
SOLICITATION NOTICE

66 -- Contact Mask Aligner

Notice Date

8/23/2003
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

Reference-Number-03-812-1268
 

Response Due

9/9/2003
 

Archive Date

9/9/2003
 

Point of Contact

Jo-Lynn Davis, Contract Specialist, Phone 301-975-6337, Fax 301-975-6319, - Jo-Lynn Davis, Contract Specialist, Phone 301-975-6337, Fax 301-975-6319,
 

E-Mail Address

jo-lynn.davis@nist.gov, jo-lynn.davis@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Regulation (FAR), Federal Acquisition Circular 2001-14. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 333295 with a small business size standard of 500 employees. This acquisition is unrestricted and all interested offerors may submit a quote. ***The National Institute of Standards and Technology (NIST) has a requirement for a new contact mask aligner for use in the NIST Advanced Measurement Laboratory. The contact mask aligner must provide sub-micron lithographic features with image capture alignment features to fabricate nano-structures and devices for research in MEMS, CMOS, Ceramics, Electronics, and Biotechnology. *** All products must comply with the National Fire Protection Association Code 318 Standard for the Protection of Semiconductor Fabrication Facilities. All equipment must be manufactured in a Class 1000 or higher manufacturing environment. Final assembly and packing/sealing must be done in a certified Class 100 environment (Clean room Applications Laboratory). All products must be sealed in a clean room, and offeror must ensure proper packaging and shipping. All equipment shall be new and not refurbished. The mask and chuck hardware must be interchangeable and adaptable with the Suss Microtec MA/BA6 contact aligner system. ***All interested offerors shall provide a quote for the following item(s) meeting the following required specifications: The system must have the capability to process a wide range of semiconductor technologies including, a CCD camera optical pattern storage system for alignment application, and wafer-to-wafer bonding. The system must provide the following: 1) an offset microscope objective allowing separation as small as 8mm, or be able to view wafer flat for accurate crystal-plane orientation; 2) the flexibility to do lithographic exposures on the following sizes of substrates: 6mm to 25mm pieces, 2" - 8", and their coinciding standard mask sizes; 3) the mask and chuck hardware must be interchangeable or compatible with a Suss Microtec MA/BA6 contact aligner system; 4) a high power UV (1000 Watt) illumination exposure source; 5) minimum resolution features in the sub-micron dimension (0.75 micron or less); 6) full field exposure of up to 8" x 8"; 7) proximity, hard and soft 8) vacuum contact lithography; and 9) electrical requirements: 230V/60Hz. Additionally, the equipment must have quick maskholder and chuck changeover with tools for different substrate sizes. The system must supply the appropriate tooling to provide 6-inch capabilities out-of-the-box. The Contractor facility must have Class 100 cleanroom certification. ***Delivery shall be FOB Destination. The contractor shall pack (in accordance with requirements in the specifications) and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. ***Award shall be made to the offeror whose quote represents the best value to the Government, technical, price, and other factors considered. Quotations will be evaluated based on the following: Technical Capability; Contractor Field Support Services; Past Performance; and Prior Experience. Technical capability is the most important factor, and Contractor Field Support Services, Past Performance and Prior Experience are of equal importance. When combined the other evaluation criteria are substantially more important than price. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability, meeting or exceeding the requirement; 2) Contractor Field Support Services 3) Past Performance; 4) Prior Experience; and 5) Price ***Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the manufacturer, make and model of the product, manufacturer sales literature or other product literature which CLEARLY DOCUMENTS that the offered product meets or exceeds the specifications stated in the attachment. *** Contractor Field Support Services - the contractor must provide US based field support service. The contractor must provide East Coast support for technical concerns and questions, and replacement parts. ***Past Performance will be evaluated to determine the overall quality of the product and service provided. Evaluation of Past Performance will be based on the references provided in accordance withFAR 52.212-1(b)(10) Offerors shall provide a list of at least 4 references to whom the same or similar equipment has been provided. The list of references shall include, at a minimum: the name of the company or organization and the contact person; telephone number of the contact person; contract or grant number; dollar amount of the contract; address and telephone number of the Contracting Official, if applicable; and the date of delivery or the date services were completed. *** Prior Experience will be evaluated to determine the degree of the offeror's experience in providing, installing, and servicing comparable Mask Aligner systems for the types of applications described herein. Prior experience shall be evaluated based on information provided in the quotation and/or through information obtained by references. NOTE: For the evaluation of Past Performance and Prior Experience the Government is not required to contact all references provided by the Offeror. Also, references other than those identified by the Quoter may be contacted by the Government to obtain additional information that will be used in the evaluation of the offeror's past performance and past experience. Information for the evaluation of past performance and past experience will be requested from the list of references or other sources previously stated. Performance and experience information may also be used in making a determination of responsibility. ***All specifications shall be successfully demonstrated before final acceptance and final payment by the Government. Warranty shall commence upon final acceptance by the Government. ***The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items. ***The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: (1) 52.219-3, Restrictions on Subcontractor Sales to the Government, Alt I; (7) 52.219-8, Utilization of Small Business Concerns; (8) 52.219-9, Small Business Subcontracting Plan (13) 52.222-3, Convict Labor; (14) 52.222-19, Child Labor - Cooperation with Authorities and Remedies; (15) 52.222-21, Prohibition of Segregated Facilities; (16) 52.222-26, Equal Opportunity; (17) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.SC. 4212); (18) 52.222-36, Affirmative Action for Workers with Disabilities; (19) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212); (23) 52.225-5, Trade Agreements (24) 52.225-13, Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; and (30) 52.232-33, Payment by Electronic Funds Transfer-Other Than Central Contractor Registration. *** Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. All offerors shall submit ALL of the following: 1) An original and two (2) copies of a quotation which addresses all items; 2) Technical description and/or descriptive product literature 3) Description of commercial warranty; 4) Two (2) copies of the most recent (relevant portions) of published price list(s); and 5) A completed copy of the following provisions: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-3, and Offeror Representations and Certifications-Commercial Items which may be downloaded at www.acqnet.gov; 6) NFPA 318 and Clean Room Certifications. 7) For Large Business - A Small Business Subcontracting Plan in accordance with the format identified in Attachment II. All offers should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Jo-Lynn Davis, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. Offerors shall ensure the RFQ number is visible on the outermost packaging.***Submission must be received by 3:00 p.m. local time on August 29, 2003.***FAXED AND/OR EMAIL QUOTES WILL NOT BE ACCEPTED. *** SECURITY REQUIREMENTS: Because of heightened security, FED-EX, UPS or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery must be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice must be made to the Contracts Office at 301-975-6337. Notice must include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. NIST IS NOT RESPONSIBLE FOR LATE DELIVERY DUE TO THE ADDED SECURITY MEASURES. In addition, Offerors who do not provide a 48 hour notification in order to coordinate entrance to the NIST campus assume the risk of not being able to deliver quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, building, room number, etc.) If 48 hour notification was not provided, it is suggested that your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitors center and complete delivery.
 

Place of Performance

Address: 100 Bureau Drive, Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00410563-W 20030825/030823213055 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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