SOLICITATION NOTICE
66 -- Dual Stage Molecular Beam Plasma System
- Notice Date
- 1/16/2003
- Notice Type
- Solicitation Notice
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-03-R-TB04
- Archive Date
- 1/16/2004
- Point of Contact
- John Booros, Contract Specialist, Phone 202-767-2120, Fax 202-767-5896, - Wayne Carrington, Contracting Officer, Phone 202-767-0393, Fax 202-767-5896,
- E-Mail Address
-
booros@contracts.nrl.navy.mil, carrington@contracts.nrl.navy.mil
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation, N00173-03-R-TB04, is issued as a Request for Proposal (RFP). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular FAC 01- 11 dated 31 December 2002. The associated NAICS code is 334516 and small business size standard is 500 employees. NRL has a requirement for a research grade molecular beam mass spectrometer (0-300 amu, 0.5 amu or better resolution) with thoriated iridium filaments which is computer interfaced and software controlled to carry out plasma diagnostics in a variety of plasma enhanced deposition systems. The instrument will mainly be used to interrogating the plasma chemistry leading to fluxes of reactive positive and negative ions and open shell neutral species in discharges containing organic precursors formed in a UHV compatible chamber. Nominally, the plasma itself is cold, being at or slightly above room temperature with 5 30 Volt plasma potentials. NRL will also investigate the role of ion energies on growing films, thus necessitating the construction and incorporation of an integral, independently biasable, temperature controlled, sampling chuck. The plasma source operates from 5 to hundreds of millitorr, thus requiring two stages of differential pumping and a variable frequency and duty factor shutter on the instrument sampling orifice. At this time the plasma generation is inherently a pulsed process, but NRL is capable of generating continuous operation as well. Basic applications: NRL must be able to detect positive ions, neutral species and negative ions during all parts of the discharge and the afterglow. Data acquisition would preferably be Windows compliant and allow compatibility with other software applications, through "Export" or "Cut 'n Paste" capabilities. NRL requires real time resolution of one microsecond i.e. the detector/preamp has to be gateable to one microsecond, with the gate delay and width being externally triggerable and easily set within the QMS control software. Scannable gating and signal averaging is required as well, similar to boxcar averaging techniques, from within the software. Species detection must also be easily set within the software, switching from positive ions, neutrals and negative ions (i.e. no hardware changes that requires demounting or venting of the spectrometer). Energy analysis of all species is necessary as well with resolution better than 0.5 eV. In order to identify and quantify reactive neutral radical species present in the incident surface flux, NLR will routinely perform appearance potential mass spectrometry. The instrument will require software programmable electron impact ionizer electronics capable of smoothly tuning from 0-150 eV with energy resolution better than 0.5 eV.The Specifications are as follows: 1. Vacuum Manifold and Pumping: Two stages of differential pumping optimized for process pressures up to 100 mtorr. System must mate to an 8" OD conflat flange. System must be configured to operate in both singly and doubly differential pumping configurations. A. First stage pumping chamber 1. Turbo molecular pump mounting flange for horizontal pump monitoring. Flange type: 6" OD Conflat 2. Mounting flange for the second stage vacuum/ mass spectrometer manifold. Flange type: 6" OD Conflat 3. Pressure gauge port. Flange type: 2 3/4" OD Conflat 4. Sampling orifice/mounting flange/support mechanism custom configured for NRL's process chamber specifications to provided as Government furnished equipment (GFE). Price to include sampling orifice kit with interchangeable orifice to enable sampling over wide pressure range. B. Second Stage pumping chamber 1. Quadrupole mass filter housing with skimmer cone with adjustable bellows to enable fine positioning of the second stage orifice with the molecular beam axis 2 Pumping manifold tee with flanges for attachment of: a) quadrupole mass filter housing, b) quadrupole gauge head c) turbo molecular pump d) Penning gauge 11. Vacuum gauging: The manufacturer will provide the following gauges: A. First stage: 1. Ionization gauge for high vacuum with pressure range from 1.0 E-10 torr to 1.0 E-03 torr. 2. Thermal Conductivity gauge for foreline with range from 1.0 E-4 to 1.0 E 02 torr. B. Second Stage: 1. Ionization gauge for high vacuum equipped with quadrupole overpressure protection circuit with pressure range from 1.0 E-10 torr to 1.0 E-03 torr. 2. Thermal Conductivity for foreline with range from 1.0 E-4 to 1.0 E 02 torr. C. Controllers: 1. Ionization gauge, dual channel 2. Thermal Conductivity gauge, dual channel 111. Required Capabilities A. Mass Range: 1 300 amu Mass/Energy Analyzer for positive and negative ions. Less than 5 percent valley resolution throughout mass range. Peak width less than 0.25 amu B. Energy range: plus or minus 1000 eV resolution better than 0.5 eV C. Detector: positive and negative ion detection 1. Faraday Cup (analog) 2. Electron Multiplier (pulse counting) D. Ionizer: 1. Electron Impact: range 0 150 eV. Resolution: 0.5 eV over entire range 2. Integral electron attachment capability for neutral species detection, identification and energy analysis. E. Molecular Beam Chopper: variable frequency: 0 to 100 kHz and duty factor: 0 to 100 percent. F. RF or DC biased Sampling Electrode with interchangeable orifice and dark space shield, water cooled. G. Computer interface and operating software (Windows). H. Other: 1. Spare and field serviceable ion source filaments 2. On-site Installation and training 3. Housing and elevator assembly for single operator removal from existing plasma reactor. 4. Additional required features: a) Integral sector field energy analyzer for positive and negative ion energy distributions. Species detection must be easily set within software, switching between positive and negative ions and neutrals, i.e. no hardware changes which requires demounting detector and venting the vacuum system. b) Appearance potential spectroscopy moduIe for identification and quantification of plasma radicals. Requires ionizer to scan electron energy smoothly with narrow resolution (see above) Module and data acquisition sequence easily set within software. c) Real time Signal Gating detector /preamp with gate delay and width internally and externally triggerable input for discharge and afterglow analysis. Time resolution one microsecond and easily set within software. Delivery and acceptance is at NRL, 4555 Overlook Ave. SW, Washington, D.C. 20375, FOB Destination. Delivery shall be no later than 90 days from date of award. The provision at 52.212-1, Instructions to Offerors--Commercial, applies to this acquisition. The Government intends to award a contract resulting from this solicitation to that responsible offeror proposing the lowest price for the items that have been determined to comply with the requirements of the specifications and solicitation. The proposal must demonstrate an understanding of the requirement and the ability to meet the specifications. General statements that the offeror can or will comply with the requirements, that standard procedures will be used, that well-known techniques will be used, or paraphrases the RFP specifications in whole or in part will not constitute compliance with this requirement concerning the content of the technical proposal. OFFEROR MUST COMPLETE AND SUBMIT WITH ITS PROPOSAL, FAR 52.212-3 OFFEROR REPRESENTATIONS AND CERTIFICATIONS--COMMERCIAL ITEMS AND DFARS 252.212-7000 OFFEROR REPRESENTATIONS AND CERTIFICATIONS--COMMERCIAL ITEMS, WHICH ARE AVAILABLE ELECTRONICALLY AT : HTTP://HERON.NRL.NAVY.MIL/CONTRACTS/REPS&CERTS.HTM The clause at FAR 52.212-4, Contract Terms and Conditions-Commercial Items and FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders--Commercial Items, applies to this acquisition. The additional FAR clauses cited in the clause are applicable to the acquisition: FAR 52.203-6, FAR 52.219-4, FAR 52.219-8, FAR 52.222-19, FAR 52.222-21, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, FAR 52.225-13, FAR 52.225-15, FAR 52.232-33, and FAR 52.247-64. The DFARs clauses at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items is applicable. The additional DFARs clauses cited in the clause are applicable: DFARS 252.225-7001, DFARS 252.225-7012, DFARS 252.204-7004, DFARS 252.227-7015, DFARS 252.227-7037, and DFARS 252.243-7002. The following additional FAR clause applies: 52.203-3. The following additional DFARs clause applies: 252.204-7004. Any resultant contract will be DO Rated under the Defense Priorities and Allocations System (DPAS). The Contract Specialist must receive any questions no later than 10 calendar days before the closing date of this solicitation. An original and 2 copies of the offeror's proposal shall be received on or before 4:00 P.M. local time, 07 February 2003 at the Naval Research Laboratory, Attn: Contracting Officer, Bldg. 222, Room 115, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326. The package should be marked with the solicitation number, due date and time. The U.S. Postal Service continues to irradiate letters, flats, Express and Priority Mail with stamps for postage and other packages with stamps for postage destined to government agencies in the ZIP Code ranges 202 through 205. Due to potential delays in receiving mail, offerors are encouraged to use alternatives to the mail when submitting proposals. Facsimile proposals are authorized and may be forwarded to the contract specialist point of contact listed below. Other business opportunities for NRL are available at our website: http://heron.nrl.navy.mil/contracts/rfplist.htm
- Place of Performance
- Address: Contractor facility
- Record
- SN00240740-W 20030118/030116213841 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
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