SOLICITATION NOTICE
36 -- PHOTORESIST SPIN COATER
- Notice Date
- 7/2/2002
- Notice Type
- Solicitation Notice
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- 3-204328
- Response Due
- 7/15/2002
- Archive Date
- 7/2/2003
- Point of Contact
- Carol K. Sharp, Contracting Officer, Phone (216) 433-2771, Fax (216) 433-2480, Email Carol.K.Sharp@grc.nasa.gov
- E-Mail Address
-
Carol K. Sharp
(Carol.K.Sharp@grc.nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). Photoresist spinner for semiconductor device fabrication, 1 ea. per the following specifications: Substrates shall be spun in a solvent saturated atmosphere, under a closed cover, to minimize resist buildup at edges of round and square substrates. Cover shall be synchronized to spin at same rate of chuck to minimize turbulence. System shall include all hardware to handle the following substrates: 1 cm square pieces, 2 inch and 3 inch round wafers, and quarter sections of 2 inch wafers. The thickness of these substrates will be in the range from 250 to 1000 micrometers. System shall be upgradeable to allow processing of 4 inch, 6 inch and 8 inch wafers. Shall include microprocessor based control which shall allow for the storage of at least 20 recipes containing as many as 40 process steps each. Shall allow user to select either linear acceleration or soft acceleration. Shall include brushless servo motor which shall operate at spin speeds to at least 10,000 rpm. Shall include dispenser pump suitable for use with AZ 5200 series and AZ 4600 series photoresists. Shall include motorized dispenser arm with programmable speed and positioning. Dispenser arm shall accommodate at least 3 resist lines and 3 solvent lines. Shall include automated top side edge bead removal. Shall include automated removal of resist strings, i.e. cotton candy. Shall include nitrogen blow off to clean substrate. Shall provide automated cleaning of process chamber. Shall include automated cleaning of the photoresist dispense lines and nozzles. Shall include stainless steel cabinet with fume exhaust. The provisions and clauses in the RFQ are those in effect through FAC 97-27. This procurement is a total small business set-aside. See Note 1. The NAICS Code and the small business size standard for this procurement are 333295 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to Glenn Research Center is required within 60 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by COB July 15, 2002 and may be mailed or faxed to Carol K. Sharp, NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135, FAX 216-433-5185 and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. (1) 52.222-3, Convict Labor (E.O. 11755). (2) 52.233-3, Protest after Award (31 U.S.C. 3553). (b) The Contractor shall comply with the FAR clauses in this paragraph (b) that the Contracting Officer has indicated as being incorporated in this contract by reference to implement provisions of law or Executive orders applicable to acquisitions of commercial items or components: _x_ (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I (41 U.S.C. 253g and 10 U.S.C. 2402). __ (2) 52.219-3, Notice of Total HUBZone Small Business Set-Aside (Jan 1999). _x_ (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (Jan 1999) (if the offeror elects to waive the preference, it shall so indicate in its offer). __ (4)(i) 52.219-5, Very Small Business Set-Aside (Pub. L. 103-403, section 304, Small Business Reauthorization and Amendments Act of 1994). __ (ii) Alternate I to 52.219-5. __ (iii) Alternate II to 52.219-5. _x_ (5) 52.219-8, Utilization of Small Business Concerns (15 U.S.C. 637 (d)(2) and (3)). __ (6) 52.219-9, Small Business Subcontracting Plan (15 U.S.C. 637(d)(4)). __ (7) 52.219-14, Limitations on Subcontracting (15 U.S.C. 637(a)(14)). __ (8)(i) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323) (if the offeror elects to waive the adjustment, it shall so indicate in its offer). __ (ii) Alternate I of 52.219-23. __ (9) 52.219-25, Small Disadvantaged Business Participation Program-Disadvantaged Status and Reporting (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). __ (10) 52.219-26, Small Disadvantaged Business Participation Program-Incentive Subcontracting (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). _x_ (11) 52.222-21, Prohibition of Segregated Facilities (Feb 1999) _x_ (12) 52.222-26, Equal Opportunity (E.O. 11246). _x_ (13) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212) _x_ (14) 52.222-36, Affirmative Action for Workers with Disabilities (29 U.S.C. 793). _x_ (15) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212). _x_ (16) 52.222-19, Child Labor-Cooperation with Authorities and Remedies (E.O. 13126). __ (17)(i) 52.223-9, Estimate of Percentage of Recovered Material Content for EPA-Designated Products (42 U.S.C. 6962(c)(3)(A)(ii)). __ (ii) Alternate I of 52.223-9 (42 U.S.C. 6962(i)(2)(C)). __ (18) 52.225-1, Buy American Act-Balance of Payments Program-Supplies (41 U.S.C. 10a - 10d). __ (19)(i) 52.225-3, Buy American Act-North American Free Trade Agreement-Israeli Trade Act-Balance of Payments Program (41 U.S.C. 10a - 10d, 19 U.S.C. 3301 note, 19 U.S.C. 2112 note). __ (ii) Alternate I of 52.225-3. __ (iii) Alternate II of 52.225-3. __ (20) 52.225-5, Trade Agreements (19 U.S.C. 2501, et seq., 19 U.S.C. 3301 note). __ (21) 52.225-13, Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129). __ (22) 52.225-15, Sanctioned European Union Country End Products (E.O. 12849). __ (23) 52.225-16, Sanctioned European Union Country Services (E.O. 12849). __ (24) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration (31 U.S.C. 3332). _x_ (25) 52.232-34, Payment by Electronic Funds Transfer-Other than Central Contractor Registration (31 U.S.C. 3332). __ (26) 52.232-36, Payment by Third Party (31 U.S.C. 3332). __ (27) 52.239-1, Privacy or Security Safeguards (5 U.S.C. 552a). _x (28)(i) 52.247-64, Preference for Privately Owned U.S.-Flag Commercial Vessels (46 U.S.C. 1241). __ (ii) Alternate I of 52.247-64. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than July 10, 2002. Award will be based upon overall best value to the Government, with consideration given to the factors of proposed technical merits, price and past performance; other critical requirements (i.e., delivery) if so stated in the RFQ will also be considered. Unless otherwise stated in the solicitation, for selection purposes, technical, price and past performance are essentially equal in importance. It is critical that offerors provide adequate detail to allow evaluation of their offer (see FAR 52.212-1(b). Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications - Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed - See NASA Specific Note "B". It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=C&pin=22 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). See Note(s) __ [DELETE IF N/A]. Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html
- Web Link
-
Click here for the latest information about this notice
(http://www.eps.gov/spg/NASA/GRC/OPDC20220/3-204328/listing.html)
- Record
- SN00103921-F 20020704/020703042816 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |