SOURCES SOUGHT
59 -- MEMS SILICON BEAM SHEAR STRESS SENSORS
- Notice Date
- 4/18/2002
- Notice Type
- Sources Sought
- Contracting Office
- NASA/Langley Research Center, Mail Stop 144, Industry Assistance Office, Hampton, VA 23681-0001
- ZIP Code
- 23681-0001
- Solicitation Number
- 1-205-RBG.1234
- Response Due
- 5/3/2002
- Point of Contact
- Lionel E Nadeau, Contract Specialist, Phone (757) 864-2434, Fax (757) 864-8863, Email l.e.nadeau@larc.nasa.gov - Roberta I Hollifield, Contracting Officer, Phone (757) 864-2521, Fax (757) 864-6966, Email r.i.hollifield@larc.nasa.gov
- E-Mail Address
-
Email your questions to Lionel E Nadeau
(l.e.nadeau@larc.nasa.gov)
- Description
- NASA/LaRC is hereby soliciting information for potential sources to Design, Fabricate, and Characterize Micro Electrical Mechanical Systems (MEMS)Silicon Beam Shear Stress Sensors and Piezoelectric Actuators. A minimum quantity 160 Sensors of varying lengths and a minimum quantity of 66 Piezoelectric Actuators of various thicknesses are required. The following specifications apply: Title: MEMS Actuator and Sensor Fabrication and Characterization Description: Design, Fabrication, and Characterization of MEMS Silicon Beam Shear Stress Sensors and Piezoelectric MEMS Actuators Completion Date: Within 18 Weeks from the date of contract Sensors: MEMS Silicon Beam Shear Stress Sensors Quantity: Minimum of 20 units of each length (160 total minimum) Specifications: 1. Micro-machined silicon beams electrically insulated from the silicon substrate of 3mm x 5 mm. Sketches of the sensor and specifications are given in Figure 1 and 2, Silicon Beams - MS PowerPoint 2. Dimensions of the sensor beams are shown in the Table I 3. The top surface of the silicon beam is in plane with the upper surface of the device 4. Beam resistances are equal to or less than 10k Ohms, 1k Ohm preferred. 5. Electrical isolation of the beams is achieved by etching the top-level silicon layer surrounding the beam from the Si-SiO2-Si or other substrate structure 6. Electrical contact pads are 250 micron square 7. The electrical contact pads of the beams are positioned as far away as possible from the beam 8. Two (2) electrical contact pads for the top and bottom silicon substrate are required 9. Characterization includes measurements of resistance values and average beam dimensions Table I Die Type 1 2 3 4 5 6 7 8 Length (micron) 300 400 500 600 700 400 500 600 Width (micron) 1 1 1 1 1 0.75 0.75 0.75 ~Thickness (micron) 0.186 0.186 0.186 0.186 0.186 0.186 0.186 0.186 Gap size (micron) 1.072 1.226 1.553 2.146 3.123 1.402 1.983 3.037 Actuators: Piezoelectric MEMS Actuators (PZT based) Quantity: Total: 66 Minimum A. Pattern A: Minimum 9 units per diaphragm thickness B. Pattern B: Minimum 3 units per diaphragm thickness C. Pattern C: Minimum 3 units per diaphragm thickness D. Pattern D: Minimum 3 units per diaphragm thickness E. Pattern E: Minimum 6 units per diaphragm thickness F. Pattern F: Minimum 9 units per diaphragm thickness Specifications: 1. Four actuating diaphragm sizes are 1mm, 2mm, 2.83mm, and 4mm square for, diaphragms are rigidly fixed at the four edges 2. Actuator displacements perpendicular to the diaphragm plane at 40 Volts input are: a. 20 microns for 1mm square membrane b. 60 microns for 2 mm square membrane c. 100 microns for 2.83 mm square membrane d. 140 microns for 4mm square membrane 3. Two (2) different diaphragm thickness are requested for each diaphragm size, they are 0.2 and 5 microns 4. Sketches of the actuator dice patterns are shown in the attached MS PowerPoint file "MEMS Actuator," which includes Pattern A through F 5. Generalized characterizations of the actuation functions are required: a. Displacements with respect to diaphragm thickness b. Displacements with respect to applied voltages 2 Attachments: (Available upon request) 1. MS PowerPoint File Silicon Beams (includes Figure 1 and Figure 2) 2. MS PowerPoint file: MEMS Actuator (includes 6 actuator patterns) No solicitation exists; therefore, do not request a copy of the solicitation. If a solicitation is released it will be synopsized in FedBizOpps and on the NASA Acquisition Internet Service. It is the potential offerors responsibility to monitor these cites for the release of any solicitation or synopsis. Vendors having the capabilities necessary to meet or exceed the stated requirements are invited to submit appropriate documentation, literature, brochures, and references. Responses must include the following: name and address of firm, size of business (for this requirement, NAICS Code 334419 applies, size standard is: 500 employees); average annual revenue for past 3 years and number of employees; ownership; whether they are large, small, small disadvantaged, 8(a), HUBZone, and/or woman-owned; number of years in business; affiliate information: parent company, joint venture partners, potential teaming partners, prime contractor (if potential sub) or subcontractors (if potential prime); list of customers covering the past five years (highlight relevant work performed, contract numbers, contract type, dollar value of each procurement; and point of contact - address and phone number). Technical questions should be e-mailed to Mr. Seun Kahng at: S.K.Kahng@larc.nasa.gov Procurement related questions should be e-mailed to: MR. Lee Nadeau at: l.e.nadeau@larc.nasa.gov Please advise if the requirement is considered to be a commercial or commercial-type product. A commercial item is defined in Internet "Note A" This synopsis is for information and planning purposes and is not to be construed as a commitment by the Government nor will the Government pay for information solicited. Respondents will not be notified of the results of the evaluation. Respondents deemed fully qualified will be considered in any resultant solicitation for the requirement. The Government reserves the right to consider a small business or 8(a) set-aside based on responses hereto. All responses shall be submitted to Lee Nadeau no later than 4:30pm local time, May 3, 2002. In responding reference 1-205-RBG.1234. Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html
- Web Link
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- Record
- SN00062510-W 20020420/020418213511 (fbodaily.com)
- Source
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