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FBO DAILY ISSUE OF FEBRUARY 24, 2002 FBO #0084
SOLICITATION NOTICE

66 -- Plasma Etching & Deposition System

Notice Date

2/22/2002
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-02-Q-0248
 

Response Due

3/20/2002
 

Archive Date

4/4/2002
 

Point of Contact

Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, - Patrick Staines, Contract Specialist, Phone (301)975-6335, Fax (301)975-8884,
 

E-Mail Address

carol.wood@nist.gov, Patrick.Staines@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES.***This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2001-04 effective February 18, 2002.***The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all responsible offerors may submit a quote.***The National Institute of Standards and Technology (NIST) has a requirement for a Plasma Etching and Deposition System, for use by the NIST, Microfabrication Facility to perform critical process applications in the area of Molecular Electronics and Semiconductor Processing.***All interested offerors shall provide a quote for the following line items: LINE ITEM 0001: Quantity one (1) each Plasma Etching and Deposition System meeting the following required specifications: (A) The capabilities required from the Plasma Etching System are as follows: to etch anisotropically poly(silicon), silicon dioxide, organics and silicon nitride films with the option for isotropic etching utilizing fluorine chemistries; (B) The capabilities required from a Plasma Enhanced Deposition System are as follows: NIST requires the capabilities to deposit low-stress or zero-stress nitride films and silicon dioxide films at low temperatures (below 400 degrees C); (C) The Microfabrication Facility is a unique environment that is designed to be a multi-user R&D facility. The facilities are regularly used by NIST staff, Guest Researchers, and NIST Visitors, all employing various levels of expertise. NIST requires a high quality plasma system that is a turnkey system, and must utilize a Windows based operating system for ease of use; (D) Safety integration is also a high requirement for NIST. The system shall provide appropriate gas cylinder cabinets equipped with VCR fittings, meeting National Fire Protection Agency (NFPA) codes. Additional safety features shall include gas bypass lines allowing the gas line to be evacuated through the Mass Flow Controllers or around them. The Mass Flow Controllers shall have a metal seal to protect from corrosive gases; (E) The system software shall provide fully automated operation of programmed process recipes, including process time, gas flow, pressure regulation and power. The software shall have a multi-level password protected access code to lock-out unauthorized users from high-level control applications and system programming. The system software shall provide a tracking system to monitor various parameters for accurate data logging. The system shall provide user logs and error (failure) logs for recording tool use and performance. The software shall provide maintenance functions and capabilities for system troubleshooting, for leak checking and Mass Flow Controller calibration and zeroing. (F) The system shall provide process application support at vendor site, along with a reliable U.S. Field Service support. Major parts and components shall be available directly from U.S. vendor. ***Delivery shall be FOB DESTINATION and shall be completed not later than September 30, 2002.***The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. ***The Contractor shall deliver the equipment to NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD.***Award shall be made to the offeror whose quote offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor, Meeting or Exceeding the Requirement, 2) Past Performance, and 3) Price. Technical and Past Performance, when combined, are more important than price.***Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the manufacturer, make and model of the products, manufacturer sales literature or other product literature which addresses all specifications, and clearly documents that the offered products meet or exceed the specifications stated above. ***Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10). Offerors shall provide a list of at least three (3) references to whom the same or similar equipment has been provided. The list of references shall include, at a minimum: The name of the company or organization and the reference contact person; the telephone number of the reference contact person; the contract or grant number; the amount of the contract; the address and telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed.***The following provisions and clauses apply to this acquistion: PROVISIONS: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offeror Representations and Certifications-Commercial Items; 52.219-22 Small Disadvantaged Business Status. ***CLAUSES: 52.212-4 Contract Terms and Conditions Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (2) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its offer); (8) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its offer); (11) 52.222-21, Prohibition of Segregated Facilities; (12) 52.222-26, Equal Opportunity; (13) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (14) 52.222-36, Affirmative Action for Workers with Disabilities; (15) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (16) 52.222-19 Child Labor-Cooperation With Authorities And Remedies; (18) 52.225-1, Buy American Act-Balance of Payment Program-Supplies; (21) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; and (24) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration; and Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer which can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ***Offerors shall submit ALL of the following: 1) An original and two (2) copies of a quotation which addresses Line Item 1; 2) Technical description and/or product literature; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); and 5) A completed copy of the following provisions: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-3 Offeror Representations and Certifications-Commercial Items; and 52.219-22 Small Disadvantaged Business Status. All provisions may be downloaded at www.arnet.gov/far.***All quotes shall be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Carol A. Wood, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571.***Offerors shall ensure the RFQ number is visible on the outermost packaging.***Submission shall be received by 3:00 p.m. local time on March 20, 2002. FAX and E-MAIL QUOTES SHALL NOT BE ACCEPTED.
 

Place of Performance

Address: NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD

Zip Code: 21742

Country: USA
 

Record

SN00029579-W 20020224/020222213115 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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