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FBO DAILY ISSUE OF JANUARY 26, 2002 FBO #0055
SOLICITATION NOTICE

J -- ONE YEAR MAINTENANCE, I-LINE STEPPER

Notice Date
1/24/2002
 
Notice Type
Solicitation Notice
 
Contracting Office
53560 Hull Street Bldg A33 Rm 1602W, San Diego CA 92152-5001
 
ZIP Code
92152-5001
 
Solicitation Number
N66001-02-Q-4751
 
Response Due
1/30/2002
 
Archive Date
3/1/2002
 
Point of Contact
Point of Contact - GAYNELLE V PARKER, Contract Specialist, 619-553-0889
 
Small Business Set-Aside
N/A
 
Description
POC Purchasing Agent, Gaynelle Parker, 2212, (619)553-0889. Contracting Officer, Wayne Johnson, 2211, (619)553-9046 DESC: This is a combined synopsis/solicitation prepared in accordance with FAR Part 13. No hard copy Request for Quote (RFQ) will be prepared or made available for distribution. Award will be based on responsive, responsible, technically acceptable low bids. The government intends to award, on a sole source basis, a maintenance contract to Ultratech Stepper in accordance with the following Statement of Work (SOW). STATEMENT OF WORK: INTRODUCTION: The purpose of this contract is to provide routine preventive maintenance and emergency repairs as required for the XLS-7300 i-line stepper in the Integrated Circuit Fabrication Facility (ICFF) of SPAWAR Systems Center San Diego (SSC SD). The stepper is a complex electromechanical optical system that is used to produce patterns on silicon wafers for the manufacture of electronic devices and integrated circuits. It utilizes several light sources each with specific purposes and includes mercury arc lamps and lasers. The critical elements of the stepper are enclosed in a chamber where temperature and humidity are carefully controlled. The sensitive electromechanical system provides precise alignment, rotation, focus, and exposure to produce circuit elements that are 0.5 microns or smaller and place them within 0.1 micron of the intended location relative to as many as 15 underlying patterns. Proper operation including precise imaging and positioning requires frequent attention by highly trained service engineers. Rapid response is required in the case of system failure because the stepper is the critical element in a process flow that requires the use of the stepper as much as twenty times as much as any other equipment in the manufacture of a typical product. If the stepper stops working, the fabrication work is halted. SCOPE The purpose of this contract is to provide for the routine preventive maintenance and emergency repair as required for the XLS-7300 i-line stepper in the Integrated Circuit Fabrication Facility (ICFF) of SPAWAR Systems Center San Diego (SSC SD). TECHNICAL REQUIREMENTS: Contractor shall: Schedule and perform on-site routine preventive maintenance (PM) of the stepper once every month during the contract period. A PM will include: Cleaning and lubrication of all mechanical systems. Installation of and proper uniformity adjustment of mercury arc lamps. Checking, recording and correcting for registration overlay errors. Back up system constants and job setup data to tape. Place a field service engineer on site within twenty-four (24) hours of notification of a functional failure that requires emergency service as determined by ICFF personnel. Provide technical support via telephone. Provide PM, technical support, and emergency services during the period from 8:00 am to 5:00 pm on Monday through Friday excluding holidays. The contractor and the ICFF personnel depending upon circumstances and in the best interests of the operation of the stepper may mutually agree upon exceptions. Provide all parts for the performance of the maintenance and repair of the stepper excluding the projection lens and the following consumables which will be provided by the SSC SD ICFF if required: Mercury arc lamps, frosty wafers, O-rings, printer parts or materials, test reticules, floppy disks, autoloader belts, filters, and fuses. CONTRACT PERIOD Twelve (12) months from the date of award. TECHNICAL REPRESENTATIVES Mark Roser, Code D876, (619) 553-1554, Fabrication Manager, Charley Young, Code D876, (619) 553-3890, Lead Engineer Photolithography. Other Security: Work performed on this task will be unclassified. Place of Performance: SPAWARSYSCEN, San Diego, Bldg 560N Facsimile quotations may be sent to (619)553-1062. Questions may be directed to Gaynelle Parker (619)553-0889, email parkerg@spawar.navy.mil. Note 22 applies, however, all offers received with 7 days (in lieu of 45 days) after date of publication of this synopsis will be considered by the government. The applicable NAICS Code/Size Standard is: 811212/$18.0. Note: Full text of the Federal Acquisition Regulation (FAR) can be accessed on-line at http://farsite.hill.af.mil. Offerors must complete and submit with their quote, a copy of FAR 52.219-1 Alt. I/II. Central Contractor Registration is required for resulting award. Information may be found at htt://www.ccr2000.com Cite: (W-339 SN508011)
 
Web Link
Click on this link to access the SPAWAR Solicitation Page
(https://e-commerce.spawar.navy.mil/command/02/acq/navhome.nsf/homepage?readform&db=navbusopor.nsf&whichdoc=F7286A47CCF8831388256B4B005B768F&editflag=0)
 
Record
SN20020126/00018575-020124210320 (fbodaily.com)
 
Source
FedBizOpps.gov Link to This Notice
(will not be valid after Archive Date)

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