SOLICITATION NOTICE
66 -- Instruments and Laboratory Equipment
- Notice Date
- 1/18/2002
- Notice Type
- Solicitation Notice
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-02-R-MM02
- Response Due
- 2/18/2002
- Archive Date
- 3/5/2002
- Point of Contact
- Marita Thompson, Contract Specialist, Phone 202-767-0666, Fax 202-767-6197, - Carol Parnell, Contracting Officer, Phone 202-767-2372, Fax 202-767-6197,
- E-Mail Address
-
thompson@contracts.nrl.navy.mil, parnell@contracts.nrl.navy.mil
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulation (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation, N00173-02-R-MM02, is issued as a request for proposal (RFP). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular #01-03, DCN #2001-1206, and NAPS as of 21 Dec 2001. This RFP is being issued under full and open competition. The associated NAICS code 333314 with a small business size standard of 500. NRL has a requirement for Contract Line Items Numbers (CLINS) as follows: CLIN 0001 - The Contractor shall provide a 4 inch Mask Aligner, SUSS MA6 or equivalent, in accordance with the required specification, 1 each; CLIN 0002 - The Contractor shall provide an off-set for the trade-in of the current SUSS MJB3 Mask Aligner (Serial Number 2311) and Isolation Table (Serial Number 877612), which are currently owned by NRL. The required instrument shall meet or exceed the following Specifications: The Mask Aligner shall be designed for high resolution photolithography operating in a class 1000 clean room environment. The Mask Aligner must be designed to handle shaped substrates of varying thickness, as well as standard size wafers up to 150 mm in diameter. The Contractor shall supply separate tooling to handle both 3 inch and 4 inch diameter wafers. Quick Maskholder and Chuck Changeover for different substrate sizes without tools is required. The Mask Aligner must be equipped with diffraction reducing optics and it must be capable of 0.6 mm resolution when used in vacuum contact and operating with a 400nm exposed wavelength. The following Mask Aligner contact exposure programs are required: vacuum, hard, soft contact and proximaty. X- and Y- overlay for the maskaligner must be below 5mm. Improvement in resolution to 0.2mm must be possible by adding 300 nm or 250nm exposure optics or an excimer laser. The Mask Aligner must be capable of exposing wafers and substrates up to 6mm in thickness. Large alignment gap processing, which allows up to 300 micron gaps, with the ability to align to a stored image of the alignment target must be included in the Mask Aligner. In conjunction with the large alignment gap processing a robust leveling system for accurate and reliable proximity gap setting is required. The top side alignment microscope must have dual CCD cameras and 3 levels of magnification. The microscope scan speed must be operator adjustable without irruption of the alignment procedure. A position reference feature that allows a single microscope objective to shift between two alignment marks in close proximity during the alignment procedure must be included within the Mask Aligner. The exposure lamp power supply must be able to be operated in either a constant power or a constant intensity mode. The Mask Aligner must be capable of storing 50 different processing programs. The Mask Aligner shall include a vibration isolation table. The Contractor shall provide on site installation and training. Complete Mask Aligner documentation shall include operating instructions schematics and spare parts list. In accordance with DFARs 252.217-7005, Offering Property for Exchange (Dec 1991), (a) The property described in item number CLIN 0002, is being offered in accordance with the exchange provisions Section 201(c) of the Federal Property and Administrative Services Act of 1949, 63 Stat. 384 (40 U.S.C. 481(c)). (b) The property is located at The Naval Research Laboratory, 4555 Overlook Avenue, S.W., Washington, DC 20375. Offers may inspect the property during the period Thursday, 6 February 2002, from 10:00AM to 12:00PM, local time. (End of Provision) Offerors wishing to inspect the above property described in item number CLIN 0002, must contact the Contract Specialist 5 calendar days prior to the day of inspection to schedule entrance to the NRL. Delivery and acceptance is at NRL, 4555 Overlook Ave., SW, Washington, DC 20375, FOB Destination. Delivery shall be no later than 90 days from date of contract award. The provision at FAR 52.212-1, Instructions to Offerors-Commercial Items applies to this acquisition. The provision at FAR 52.212-2, Evaluation -Commercial Items is incorporated and the Government intends to award a contract resulting from this solicitation to that responsible offeror conforming to the solicitation will be the most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate the offers: (1) technical capability of the item offered to meet NRL's need (2) price and (3) past performance. Offeror must complete and submit with its proposal, FAR 52.212-3 Offeror Representations and Certifications--Commercial Items and DFARS 252.212-7000 Offeror Representations and Certifications--Commercial Items, which are available electronically in full text at: http://heron.nrl.navy.mil/contracts/reps&certscomm.pdf . The clause at FAR 52.212-4, Contract Terms and Conditions ---Commercial Items and FAR 52-212-5, Contract Terms and Conditions Required to Implement Statutes of Executive Orders-Commercial Items, applies to this acquisition. The additional FAR clauses cited in the clause are applicable to the acquisition: FAR 52.203-6, FAR 52.219-4, FAR 52.219-8, FAR 52.222-21, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, FAR 52.225-13, FAR 52.232-33 and FAR 52.247-64. The DFARs clauses at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items is applicable. The additional DFARs clauses cited in the clause are applicable: DFARS 252.225-7007 and DFARS 252.225-7012. The following additional FAR clauses apply: 52.203-8 and 52.203-10. The following additional DFARs clauses apply: 252.204-7004, 252.232-7009. Any resultant contract awarded will be a DO rated order under the Defense Priorities and Allocations Systems (DPAS). The Contract Specialist must receive any questions no later than 10 calendar days before closing date of the proposal. An original and two (2) copies of the Offeror's proposal shall be delivered to Contracting Officer, Code 3230.MM, Bldg 222, Rm 115, Naval Research Laboratory, 4555 Overlook Avenue, S.W., Washington, DC 20375-5326 and received on or before 4:00PM, local time, on February 18, 2002. The package should be marked with the solicitation number and the due date and time.
- Place of Performance
- Address: NAVAL RESEARCH LABORATORY, WASHINGTON, DC
- Zip Code: 20375
- Zip Code: 20375
- Record
- SN20020120/00016069-020119090224 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(will not be valid after Archive Date)
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